2022
DOI: 10.1016/j.jqsrt.2022.108348
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The impact of loss on high-Q resonant metasurfaces: A case study for heated a-Si:H

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Cited by 9 publications
(8 citation statements)
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“…Figure 3b shows the transmission spectra measured from the selected metasurface at different conditions, which are explained as follows. TiO 2 is expected to be more resistant to heat-induced changes than a-Si:H. 15,30 To test the response of the metasurface functionality to high temperature, it was annealed at 770 • C for 3 hours. These conditions were chosen to reflect the potential conditions of a CVD growth process of two-dimensional transition metal dichalcogenides.…”
Section: Resultsmentioning
confidence: 99%
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“…Figure 3b shows the transmission spectra measured from the selected metasurface at different conditions, which are explained as follows. TiO 2 is expected to be more resistant to heat-induced changes than a-Si:H. 15,30 To test the response of the metasurface functionality to high temperature, it was annealed at 770 • C for 3 hours. These conditions were chosen to reflect the potential conditions of a CVD growth process of two-dimensional transition metal dichalcogenides.…”
Section: Resultsmentioning
confidence: 99%
“…This reduction is much less compared to the case of a-Si:H metasurface. 15,30 A buffer layer between the TMD, and the substrate was found to be helpful to avoid substrate effects in prior works. 31 Therefore, the TiO 2 metasurface was coated with a thin layer (10 nm) of Al 2 O 3 using atomic layer deposition process.…”
Section: Resultsmentioning
confidence: 99%
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“…This is important since the Q-factor of quasi-BIC modes dramatically drops in the presence of material absorption. 40 index data of TiO 2 thin film used for nanofabrication of our metasurfaces are shown in the Supporting Information (SI).…”
Section: Resultsmentioning
confidence: 99%
“…The metasurface is composed of a square lattice of cubic nanoresonators with a small notch in one corner similar to the structure introduced in Campione et al For the nanoresonator material, we have chosen TiO 2 instead of other more commonly used dielectric materials with a higher refractive index such as Si due to its negligible absorption loss in the visible spectral range. This is important since the Q-factor of quasi-BIC modes dramatically drops in the presence of material absorption . Measured refractive index data of TiO 2 thin film used for nanofabrication of our metasurfaces are shown in the Supporting Information (SI).…”
Section: Resultsmentioning
confidence: 99%