2021
DOI: 10.1016/j.jnoncrysol.2020.120507
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The impact of processing conditions and post-deposition oxidation on the opto-electrical properties of hydrogenated amorphous and nano-crystalline Germanium films

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Cited by 9 publications
(21 citation statements)
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“…A dense Ge:H phase, unlike a porous Ge:H phase, has an average bond length small enough to prevent the in-diffusion of H 2 O but not the in-diffusion of O 2 . 12 Moreover, if a different species was involved in the oxidation reaction, a more distinct difference between Ge–O signatures could be expected. 2.…”
Section: The Oxidation and Etching Behaviour Of Ge:h By Watermentioning
confidence: 99%
“…A dense Ge:H phase, unlike a porous Ge:H phase, has an average bond length small enough to prevent the in-diffusion of H 2 O but not the in-diffusion of O 2 . 12 Moreover, if a different species was involved in the oxidation reaction, a more distinct difference between Ge–O signatures could be expected. 2.…”
Section: The Oxidation and Etching Behaviour Of Ge:h By Watermentioning
confidence: 99%
“…In this section, the high level relations between the structural and opto-electrical characteristics are addressed. For the films presented in Figure 2 more information about the relation between the processing conditions and structural characteristics, as well as more detailed structural investigation of the films, is provided for GeCSn, [20] Ge, [22,[24][25][26] SiGe, [22,27] SiO. [24] From these collective works, three structural characteristics through which a change in density can be realized.…”
Section: Why Different Group IV Alloysmentioning
confidence: 99%
“…This effect, a reaction in which oxygen introduced in the material postdeposition results in the passivation of defects, decreasing the defect density as well the E act , has been discussed in more detail in earlier work. [24] A relatively large defect density in the Ge:H films would also explain the poor photoresponse of the Ge:H films and improvement of 𝜎 ph /𝜎 d upon oxidation. The low photoresponse indicates that only a small fraction of photo-generated charge carriers are collected.…”
Section: The Right Processing Windowmentioning
confidence: 99%
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