2014
DOI: 10.1088/0256-307x/31/12/126601
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The Impact of Shallow-Trench-Isolation Mechanical Stress on the Hysteresis Effect of Partially Depleted Silicon-on-Insulator n-Type Metal-Oxide-Semiconductor Field Effects

Abstract: The impact of shallow trench isolation (STI) mechanical stress on the hysteresis effect in the output characteristics is measured in partially depleted (PD) silicon-on-insulator (SOI) metal-oxide-semiconductor field effect transistors (MOSFETs). We develop 𝐼D hysteresis, which is defined as the difference between 𝐼D versus 𝑉D forward sweep and reverse sweep. The fabricated devices show positive and negative peaks in 𝐼D hysteresis. The experimental results show that 𝐼D hysteresis declined as the STI mechan… Show more

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“…While no thinner crystalized β -Sb nanofilms can be obtained by a direct deposition process in our experiments. In the next, we proposed a controllable thermal desorption method [47][48][49] to get the thinner crystalized β -Sb nanofilms. At low coverages, most of the Sb nanofilms are amorphous or partially crystalized.…”
Section: -3mentioning
confidence: 99%
“…While no thinner crystalized β -Sb nanofilms can be obtained by a direct deposition process in our experiments. In the next, we proposed a controllable thermal desorption method [47][48][49] to get the thinner crystalized β -Sb nanofilms. At low coverages, most of the Sb nanofilms are amorphous or partially crystalized.…”
Section: -3mentioning
confidence: 99%