The results of experiments of parts of cladding tubes from sponge based zirconium E110 alloy near-surface layers doping by means of ion-plasma technologies are presented in this paper. Alloying of material by method of pre-deposited Fe, Y, Mo, Al, Mg, Cr films ion mixing is performed on installation ILUR-03 by means of radial Ar + ion beam 3-4 keV average energy. State of modified material layer and oxides, grown on the modified samples in argon-water steam mixture at 1200 ∘ C studied by scanning electron and ion microscopy methods, X-ray analysis and secondary ion mass spectroscopy. It is shown that treating modes defined contribute to the barrier for oxygen penetration and material oxidation formation near ion-doped surface.