Journal of Alloys and Compounds
 2024
DOI: 10.1016/j.jallcom.2024.175564
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The impact of titanium alloying on altering nanomechanical properties and grain structures of sputter-deposited cobalt for electromigration reliability enhancement

Giin-Shan Chen,
Meng-Jie Lin,
Chun-Wei Huang
et al.
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