The improvement of the atmospheric-pressure glow plasma method and the deposition of organic films

Yokoyama, T.; Kogoma, Masuhiro; Kanazawa, Susumu; Moriwaki, Takao; Okazaki, S.

doi:10.1088/0022-3727/23/3/021

Cited by 144 publications

(91 citation statements)

References 6 publications

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“…Simple hydrocarbons and fluorocarbons were used to deposit plasma polymers or carbonlike films. Nowadays, an assortment of deposition precursors is known from that a broad variety of films can be formed [9][10][11][12][13][14][62][63][64][65][66][67]. With respect to the demands of semiconductor industry, inorganic precursors (e.g.…”

Section: Fields Of Applicationmentioning

confidence: 99%

The barrier discharge: basic properties and applications to surface treatment

Wagner

Brandenburg

Kozlov

et al. 2003

Vacuum

682

474

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Barrier discharges (BDs) produce highly non-equilibrium plasmas in a controllable way at atmospheric pressure, and at moderate gas temperature. They provide the effective generation of atoms, radicals and excited species by energetic electrons. In the case of operation in noble gases (or noble gas/halogen gas mixtures), they are sources of an intensive UV and VUV excimer radiation. There are two different modes of BDs. Generally they are operated in the filamentary one. Under special conditions, a diffuse mode can be generated. Their physical properties are discussed, and the main electric parameters, necessary for the controlled BD operation, are listed. Recent results on spatially and temporally resolved spectroscopic investigations by cross-correlation technique are presented. BDs are applied for a long time in the wide field of plasma treatment and layer deposition. An overview on these applications is given. Selected representative examples are outlined in more detail. In particular, the surface treatment by filamentary and diffuse BDs, and the VUV catalyzed deposition of metallic layers are discussed. BDs have a great flexibility with respect to their geometrical shape, working gas mixture and operation parameters. Generally, the scaling-up to large dimensions is of no problem. The possibility to treat or coat surfaces at low gas temperature and pressures close to atmospheric once is an important advantage for their application.

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Section: Fields Of Applicationmentioning

confidence: 99%

The barrier discharge: basic properties and applications to surface treatment

Wagner

Brandenburg

Kozlov

et al. 2003

Vacuum

682

474

View full text Add to dashboard Cite

show abstract

“…Atmospheric pressure discharge plasma used in this study is usually generated by electric discharge and includes numerous particles such as ions, electrons, and radicals under atmospheric pressure. One of the major uses of the plasma is the surface treatment of non-biological materials such as glass and polymers aiming at surface modification (Yamamoto et al, 1995(Yamamoto et al, , 2000Yokoyama et al, 1990). In this study, we have attempted to apply the plasma technology to gene transfer, because electroporation, which is the most commonly used gene transfer technology, induces genes into cells by transiently perturbing the cell surface, that is, cell membrane (Benz and Zimmermann, 1981;Kinosita and Tsong, 1977;Knight and Baker, 1982;Neumann et al, 1982;Sower and Lieber, 1986), and discharges could effect Figure 2.…”

Section: Discussionmentioning

confidence: 99%

An epoch‐making application of discharge plasma phenomenon to gene‐transfer

Ogawa

Morikawa

Ohkubo-Suzuki

et al. 2005

Biotech & Bioengineering

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We discovered an epoch-making gene transfer method utilizing discharge plasma. Although an electroporation method is commonly used in present gene transfer experiments, it cannot transfer genes into primary cells sufficiently. The atmospheric pressure discharge plasma employed in this study was originally used for surface treatment of non-biological materials. We hypothesized that it could provide a suitable effect on the surface of target cells and applied it to gene transfer into various types of cells. The plasma technology succeeded in the efficient transfer of green fluorescence protein (GFP) plasmid into post-mitotic neuronal cells obtained from cerebral cortices of rats, into which an electroporation with conventional equipment cannot transfer genes sufficiently, as the cells were attached. After the transfection of rat pheochromocytoma PC12 cells with the GFP gene by plasma treatment, the cells retained their function, that is, nerve growth factor-induced differentiation. Furthermore, gene transfer with the plasma technology was also applicable to other types of cell lines such as HeLa cells and Chinese hamster lung (CHL) cells as adherent cell lines, and Jurkat cells as a suspended cell line, and another type of primary cell, human umbilical vein endothelial cells (HUVEC). In conclusion, the plasma method is an epoch-making gene transfer technology which efficiently transfers genes into primary cells into which electroporation cannot transfer genes. Moreover, the method is able to universally transfer genes into various types of cells as the function of the cells was maintained.

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“…A blocking mask is required to avoid undesired site depositions of PP-films on the substrates. Furthermore, a vacuum chamber of reduced pressure processes and sealing with inert gases for atmospheric pressure processes are also necessary to avoid PP-film oxidation problems [11,12].…”

Section: Hiromi Yatsudamentioning

confidence: 99%