The Influence of C₂H₂ Flow Rate on the Composition, Structural and Properties of the Ni/α-C:H Films Deposited by FCVA

Abstract

Nickel/carbon nanocomposite films with different C2H2 flow rate were deposited by filtered cathodic vacuum arc (FCVA) device. The composition and nanostructure of the films were investigated by X-ray diffraction (XRD), Raman scattering spectroscopy, X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM). The grain size increase from 8.7 nm at the C2H2 flow rate of 10 sccm to the maximum of 11.5 nm at 30 sccm, after that it decrease. The mean phase separation is in the range of 0.2-2.6 nm. The hardness of 21.6 Gpa was obtained at 50sccm.