The Influence of Etching in a Glow Discharge Plasma on the Properties of Wear-Resistant Coatings for Metal-Cutting Tools
Alexey A. Vereschaka,
Jury Bublikov,
Catherine Sotova
et al.
Abstract:The properties of three Ti-TiN-(Ti,Cr,Al)N coatings, which have identical thickness and elemental composition, but a different scheme of ion etching by glow discharge plasma during the deposition process, were compared. Various etching times of the substrate before coating deposition were considered, as well as the use of additional etching during the deposition process and after coating deposition. It was found that additional etching in a glow discharge plasma during the deposition process and after
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