The Influence of External Pressure on Resonant Frequency of SAW Resonator

Abstract

The results of numerical simulations and experimental measurements of surface acoustic wave resonator centre frequency and amplitude dependence on external pressure changes in the range 01 atm are presented in the paper. According to the analytical model as well as numerical calculations the pressure inuence on the resonator centre frequency is linear. Unfortunately, in the real measurements the linearity is dicult to observe. Additional eects that modify the linear dependence of the centre frequency on pressure are caused by water particles. It is well visible especially in the low pressure range. The phenomenon can be applied for research of water contents in dry gases as well as construction of acoustoelectronic vacuometers.

3D Printed Pressure Sensor Based on Surface Acoustic Wave Resonator

“…The deformation causes two effects on resonance frequency of the SAW resonator. Firstly, nonlinear deformation due to the pressure overload will affect the stiffness coefficient and elastic modulus of the piezoelectric material, thereby resulting in the variation of wave velocity of the SAW propagation [17]. Secondly, the deformation leads to the variation of width between IDT fingers, which further affect the period of the IDT, as shown in Fig.…”