The influence of substrate temperature on femtosecond laser micro-processing of silicon, stainless steel and glass

Yahng, J. S.; Nam, Jung Rim; Jeoung, Sae Chae

doi:10.1016/j.optlaseng.2009.02.001

Cited by 31 publications

(27 citation statements)

References 18 publications

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“…The effect of substrate temperature on ultrafast laser ablation of silicon (thickness 650 mm), stainless steel (thickness 100 mm) and glass (thickness 1 mm) was reported by Yahng et al [107]. It was observed that the increase of surface temperature decreases the surface roughness for all three samples.…”

Section: Metalsmentioning

confidence: 60%

Laser Beam MicroMachining (LBMM) – A review

Mishra¹,

Yadava

2015

Optics and Lasers in Engineering

238

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Section: Metalsmentioning

confidence: 60%

Laser Beam MicroMachining (LBMM) – A review

Mishra¹,

Yadava

2015

Optics and Lasers in Engineering

238

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“…Thus, for Au the threshold fluence does not change if the sample is thicker than 800 nm, and for Ni saturation is reached at 50 nm [64]. Yahng et al (2009) studied the effect of the sample temperature on threshold fluence and found that for Si the threshold fluence decreases with increasing temperature from 300 to 900 K, whereas for SS304 no change in ablation threshold was found, but the ablation efficiency increased by 20% [67]. This behaviour can be attributed to the increase in the absorption coefficient at high temperature.…”

Section: Ablation Thresholdmentioning

confidence: 98%

Fabrication of Micro/Nano Structures on Metals by Femtosecond Laser Micromachining

2014

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Abstract:Femtosecond laser micromachining has emerged in recent years as a new technique for micro/nano structure fabrication because of its applicability to virtually all kinds of materials in an easy one-step process that is scalable. In the past, much research on femtosecond laser micromachining was carried out to understand the complex ablation mechanism, whereas recent works are mostly concerned with the fabrication of surface structures because of their numerous possible applications. The state-of-the-art knowledge on the fabrication of these structures on metals with direct femtosecond laser micromachining is reviewed in this article. The effect of various parameters, such as fluence, number of pulses, laser beam polarization, wavelength, incident angle, scan velocity, number of scans, and environment, on the formation of different structures is discussed in detail wherever possible. Furthermore, a guideline for surface structures optimization is provided. The authors' experimental work on laser-inscribed regular pattern fabrication is presented to give a complete picture of micromachining processes. Finally, possible applications of laser-machined surface structures in different fields are briefly reviewed.

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“…Recently, we have reported preliminary result for the influence of substrate temperature at 900 K on femtosecond laser ablation of silicon, stainless steel, and glass. We found that the ablation efficiency as well as the surface roughness at high substrate temperature is strongly dependent on the material properties such as optical band gap and thermal conductivity [14].…”

Section: Introductionmentioning

confidence: 90%