1992
DOI: 10.1016/0039-6028(92)91347-e
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The influence of surface roughness on electronic transport in thin films

Abstract: In thin films, the structure of the surfaces considerably mfhences the transport of conduction electrons. For mesoscopic roughnesses m the range of a few nm, this ~s due to the varying film thickness, which gwes rise to a spatially fluctuating conductance Moreover, mxroscop~c roughnesses can contnbute to the scattermg of the electrons and therefore addmonally enhance the thm-film resistivity. For a quanmat~ve understandmg of the transport m these systems, a detatled investigation of the surface roughness combi… Show more

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Cited by 17 publications
(4 citation statements)
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“…This agrees well with our previous results of in-situ resistance measurements obtained for similar multilayers [8]. In thin film systems there is a good correlation between the initial mesoscopic roughness found by scanning tunneling microscopy and the onset of Ohmic conductivity [12]. This correlation allowed us to estimate the initial roughness of Py deposited on glass at about 1.2 nm.…”
Section: As-deposited Multilayerssupporting
confidence: 81%
“…This agrees well with our previous results of in-situ resistance measurements obtained for similar multilayers [8]. In thin film systems there is a good correlation between the initial mesoscopic roughness found by scanning tunneling microscopy and the onset of Ohmic conductivity [12]. This correlation allowed us to estimate the initial roughness of Py deposited on glass at about 1.2 nm.…”
Section: As-deposited Multilayerssupporting
confidence: 81%
“…In the case of mesoscopic roughness in the range of a few nanometers, this because of the film's varying thickness, which results in a spatially variable conductivity. Also, microscopic roughness can lead to electrons' dispersion and further improves the thin film's resistance [25].…”
Section: Morphological Studiesmentioning
confidence: 99%
“…In this regard, in particular, the nanoscale control of the Au film structure is crucial towards the determination of its properties in view of applications in functional nano-devices. For example, the roughness of deposited metal films is one of the most critical determining final electrical, optical and other properties of the systems [16][17][18][19][20][21][22][23][24][25]. As examples: (a) one of the key issue in the modern integrated circuit technology is the dramatic increase in metallic interconnect resistivity with decreasing cross section thickness.…”
Section: Introductionmentioning
confidence: 99%