The influence of target erosion on the mass spectra of clusters formed in the planar DC magnetron sputtering source

Ganeva, Marina; Pipa, A. V.; Hippler, R.

doi:10.1016/j.surfcoat.2012.10.012

Cited by 41 publications

(33 citation statements)

References 37 publications

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“…This corresponds to a groove depth of 3.8 mm. Stop of the cluster formation long before the erosion groove reaches the target thickness was also observed for other experimental conditions and materials [2,5].…”

Section: Methodssupporting

confidence: 71%

“…The erosion can be roughly characterized by the total energy dissipated in the discharge [2]. Thus, we consider the product of the discharge power and time as the target lifetime measured in kWh (kilo-watt hours).…”

Section: Methodsmentioning

confidence: 99%

“…The detailed description of the source is provided elsewhere. [2] As a source of the sputtered particles conventional balanced magnetron equipped with a circular Cu target of 5 mm thickness and of 2" diameter is used. The experimental conditions for the present work are: the discharge current is 0.4 A, the discharge voltage is about of 300 V, and the buffer gas (Ar) pressure in the magnetron chamber is 18 Pa.…”

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confidence: 99%

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Operational limit of a planar DC magnetron cluster source due to target erosion

Rai¹,

Mutzke²,

Bandelow³

et al. 2013

Nuclear Instruments and Methods in Physics Research Section B:

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The binary collision-based two dimensional SDTrimSP-2D model has been used to simulate the erosion process of a Cu target and its influence on the operational limit of a planar DC magnetron nanocluster source. The density of free metal atoms in the aggregation region influences the cluster formation and cluster intensity during the target lifetime. The density of the free metal atoms in the aggregation region can only be predicted by taking into account (i) the angular distribution of the sputtered flux from the primary target source and (ii) relative downwards shift of the primary source of sputtered atoms during the erosion process. It is shown that the flux of the sputtered atoms smoothly decreases with the target erosion.

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Section: Methodssupporting

confidence: 71%

Section: Methodsmentioning

confidence: 99%

mentioning

confidence: 99%

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Operational limit of a planar DC magnetron cluster source due to target erosion

Rai¹,

Mutzke²,

Bandelow³

et al. 2013

Nuclear Instruments and Methods in Physics Research Section B:

Self Cite

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“…Many factors contribute to the particle size, including the erosion profile of the target, the processing parameters (buffer gas flow rate, sputtering power or pulse frequency, deposition rate, cooling liquid, chamber pressure), as well as the distance from the sputtering gun to the aperture. [19][20][21][22] Yamamuro et al 23 discovered that keeping the gas flow rate relatively low produces narrow size distributions in asdeposited nanoparticles. They attribute this to the prevention a)…”

Section: Introductionmentioning

confidence: 99%

In situ measurements of plasma properties during gas-condensation of Cu nanoparticles

Koten

Voeller

Patterson

et al. 2016

Journal of Applied Physics

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Since the mean, standard deviation, and modality of nanoparticle size distributions can vary greatly between similar input conditions (e.g., power and gas flow rate), plasma diagnostics were carried out in situ using a double-sided, planar Langmuir probe to determine the effect the plasma has on the heating of clusters and their final size distributions. The formation of Cu nanoparticles was analyzed using cluster-plasma physics, which relates the processes of condensation and evaporation to internal plasma properties (e.g., electron temperature and density). Monitoring these plasma properties while depositing Cu nanoparticles with different size distributions revealed a negative correlation between average particle size and electron temperature. Furthermore, the modality of the size distributions also correlated with the modality of the electron energy distributions. It was found that the maximum cluster temperature reached during plasma heating and the material's evaporation point regulates the growth process inside the plasma. In the case of Cu, size distributions with average sizes of 8.2, 17.3, and 24.9 nm in diameter were monitored with the Langmuir probe, and from the measurements made, the cluster temperatures for each deposition were calculated to be 1028, 1009, and 863 K. These values are then compared with the onset evaporation temperature of particles of this size, which was estimated to be 1059, 1068, and 1071 K. Thus, when the cluster temperature is too close to the evaporation temperature, less particle growth occurs, resulting in the formation of smaller particles. V C 2016 AIP Publishing LLC.

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“…The increase of the aggregation length and the depth of the race-track are both supposed to trigger the formation of larger clusters. 25,38 Nevertheless, during the experiments, some uncommon size evolutions are observed. Figure 4 shows the combined influence of the increasing aggregation length and the depth of the race-track on NP size for two groups of experiment with significantly different backing plate thicknesses (0.…”

Section: Resultsmentioning

confidence: 95%

Preparation of tunable-sized iron nanoparticles based on magnetic manipulation in inert gas condensation (IGC)

Xing

Brink

Kooi

et al. 2017

Journal of Applied Physics

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Iron nanoparticles (NPs) prepared by inert gas condensation were studied using high resolution transmission electron microscopy and Wulff construction shape analysis. The NP size and shape show strong dependence on the magnetic field above the target surface. The effect of the magnetic field could be tuned by adjusting the thickness of the protective backing plate positioned in-between the target and the magnetron head. With increasing backing plate thickness, the particle size decreases and the NP morphologies evolve from faceted to close-to-spherical polyhedral shapes. Moreover, with changes in size and shape, the particle structure also varies so that the NPs exhibit: (i) a core-shell structure for the faceted NPs with size ∼15–24 nm; (ii) a core-shell structure for the close-to-spherical NPs with size ∼8–15 nm; and (iii) a fully oxidized uniform structure for NPs with sizes less than ∼8 nm having a void in the center due to the Kirkendall effect. The decrease of NP size with the increasing backing plate thickness can be attributed to a reduced magnetic field strength above the iron target surface combined with a reduced magnetic field confinement. These results pave the way to drastically control the NP size and shape in a simple manner without any other adjustment of the aggregation volume within the deposition system.

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The influence of target erosion on the mass spectra of clusters formed in the planar DC magnetron sputtering source

Cited by 41 publications

References 37 publications

Operational limit of a planar DC magnetron cluster source due to target erosion

Operational limit of a planar DC magnetron cluster source due to target erosion

In situ measurements of plasma properties during gas-condensation of Cu nanoparticles

Preparation of tunable-sized iron nanoparticles based on magnetic manipulation in inert gas condensation (IGC)

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