The influence of temperature on the pressure sensitivity of surface acoustic wave pressure sensor

Pan, Shuliang; Memon, Maria Muzamil; Wan, Jiang; Wang, Tao; Zhang, Wanli

doi:10.1016/j.sna.2021.113183

Cited by 7 publications

(6 citation statements)

References 34 publications

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“…The temperature instability of a SAW sensor chip can cause it difficult to calibrate. Pan et al (2021) analyzed the influence of temperature on the pressure sensitivity of SAW pressure sensor. Dual-channel temperature compensation design is usually used to eliminate the influence of temperature in SAW sensors.…”

Section: Stability Issues and Improvementsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

“…Also, they are compatible with microelectromechanical systems (MEMS) technologies (Ali and Prasad, 2020). To date, a large number of studies on SAW sensors have been carried out to achieve a wide variety of functions to measure physical/mechanical (Hribšek et al , 2010; Tang et al , 2022; Wang et al , 2020; Yu, 2018; Tang et al , 2015; Kim et al , 2019; Tang et al , 2020a, 2020b; Gamba et al , 2014, Zhao et al , 2022a, 2022b; Tang et al , 2021; Li et al , 2020a, 2020b; Lü et al , 2014; Tang et al , 2018a; Feng et al , 2019; Fan et al , 2022; Tang et al , 2018b; Pan et al , 2021; Memon et al , 2021; Müller et al , 2015; Tang et al , 2017; Li et al , 2019; Yang et al , 2023), chemical (Zhang et al , 2020; Kumar and Prajesh, 2022; Abraham et al , 2019; Afzal et al , 2013; Gao et al , 2018; Pasupuleti et al , 2022a; Kus et al , 2021; Vanotti et al , 2021; Pasupuleti et al , 2021; Pasupuleti et al , 2022b; Zhu et al , 2021a, 2021b; Wang et al , 2022a, 2022b, 2022c, 2022d; Devkota et al , 2022; Grabka et al , 2021; Gakhar et al , 2022; Kabir et al , 2015; Harathi et al , 2020; Yang et al , 2017; Lim et al , 2011; Ghosh et al , 2019; Kuznetsova et al , 2018; Fahim et al , 2021; Wang et al , 2015; Wang et al , 2022a, 2022b, 2022c, 2022d; Xiong et al , 2021; Luo et al , 2021; Li et al , 2020a, 2020b; Devkota et al , 2020; Nikolaou et al , 2016; Tian et al , 2023) and biological (Rana et al , 2028; Zhang et al , 2017; Prabakaran et al , 2022…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

A review of surface acoustic wave sensors: mechanisms, stability and future prospects

Tang,

Wu,

Yang

et al. 2024

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Purpose Surface acoustic wave (SAW) sensors have attracted great attention worldwide for a variety of applications in measuring physical, chemical and biological parameters. However, stability has been one of the key issues which have limited their effective commercial applications. To fully understand this challenge of operation stability, this paper aims to systematically review mechanisms, stability issues and future challenges of SAW sensors for various applications. Design/methodology/approach This review paper starts with different types of SAWs, advantages and disadvantages of different types of SAW sensors and then the stability issues of SAW sensors. Subsequently, recent efforts made by researchers for improving working stability of SAW sensors are reviewed. Finally, it discusses the existing challenges and future prospects of SAW sensors in the rapidly growing Internet of Things-enabled application market. Findings A large number of scientific articles related to SAW technologies were found, and a number of opportunities for future researchers were identified. Over the past 20 years, SAW-related research has gained a growing interest of researchers. SAW sensors have attracted more and more researchers worldwide over the years, but the research topics of SAW sensor stability only own an extremely poor percentage in the total researc topics of SAWs or SAW sensors. Originality/value Although SAW sensors have been attracting researchers worldwide for decades, researchers mainly focused on the new materials and design strategies for SAW sensors to achieve good sensitivity and selectivity, and little work can be found on the stability issues of SAW sensors, which are so important for SAW sensor industries and one of the key factors to be mature products. Therefore, this paper systematically reviewed the SAW sensors from their fundamental mechanisms to stability issues and indicated their future challenges for various applications.

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Section: Stability Issues and Improvementsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

A review of surface acoustic wave sensors: mechanisms, stability and future prospects

Tang,

Wu,

Yang

et al. 2024

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“…Shen et al proposed a filter based on the Cu/15 • Y-X LiNbO 3 /SiO 2 /Si structure, achieving a bandwidth of 31.08% [11]. Pan et al developed an SAW pressure sensor with a SiO 2 /Mo/AiN/Mo/Si/SiO 2 structure that was able to operate in high-temperature and high-pressure environments [12]. Shen et al employed a SiNx/SiO 2 /IDTs(Cu)/15 • Y-X LiNbO 3 structure, leading to the development of an ultrasmall, unpackaged SAW device [13].…”

Section: Introductionmentioning

confidence: 99%

Research on the SAW Gyroscopic Effect in a Double-Layer Substrate Structure Incorporating Non-Piezoelectric Materials

Chen,

Meng,

et al. 2023

Micromachines

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The SAW (surface acoustic wave) gyroscopic effect is a key parameter that reflects the sensitivity performance of SAW angular velocity sensors. This study found that adding a layer of non-piezoelectric material with a lower reflection coefficient than that of the upper-layer material below the piezoelectric substrate to form a double-layer structure significantly enhanced the SAW gyroscopic effect, and the smaller the reflection coefficient of the lower-layer material, the stronger the SAW gyroscopic effect, with values being reached that were two to three times those with single-layer substrate structures. This was confirmed using a three-dimensional model, and the experimental results also showed that the thickness of the piezoelectric layer and the type of the lower-layer material also had a significant impact on the SAW gyroscopic effect. This novel discovery will pave the way for the future development of SAW angular velocity sensors.

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“…The commonly used wireless temperature sensing systems (temperature sensors) include surface acoustic waves (SAW), microwave wireless temperature sensors, and inductance and capacitance (LC) [ 26 , 27 , 28 , 29 , 30 ]. The temperature sensor based on the resonant inductance capacitance (LC) circuit did not require a power supply or physical lead connection [ 31 , 32 ].…”

Section: Introductionmentioning

confidence: 99%

Wireless LC Conformal Temperature Sensor Based on Ag Film (9912-K FL) for Bearing Temperature Measurement

Feng

Hong

et al. 2022

Nanomaterials

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As the key component of aero-engines and industrial gas turbines, a bearing’s working temperature at high speed is close to 300 ℃. The measurement of an engine bearing’s temperature is of great significance to ensure flight safety. In this study, we present a wireless LC conformal temperature sensor for bearing temperatures, which integrates silver on the bearing surface in situ through a screen-printing process. This process makes Ag film (9912-K FL) firmly adhere to the bearing surface and realizes wireless measurements for bearing temperatures in situ. A high-temperature holding experiment of the prepared sensor was conducted, and the results showed that the sensor can work stably for 10 h at 300 ℃. We tested the designed wireless LC conformal temperature sensor at 20–270 ℃. The results showed that the proposed temperature sensor attained as good accuracy and stability in the temperature range 20–270 ℃. The sensitivity of the temperature measurements was 20.81 KHz/℃ when the bearing rotateds, the maximum repeatability was 0.039%, the maximum uncertainty was 0.081%, and the relative error was stable within 0.08%.

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The influence of temperature on the pressure sensitivity of surface acoustic wave pressure sensor

Cited by 7 publications

References 34 publications

A review of surface acoustic wave sensors: mechanisms, stability and future prospects

A review of surface acoustic wave sensors: mechanisms, stability and future prospects

Research on the SAW Gyroscopic Effect in a Double-Layer Substrate Structure Incorporating Non-Piezoelectric Materials

Wireless LC Conformal Temperature Sensor Based on Ag Film (9912-K FL) for Bearing Temperature Measurement

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