2000
DOI: 10.1016/s0168-583x(99)00906-4
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The influence of the oxygen partial pressure on the ion nitriding of aluminium – An investigation by means of real time elastic recoil detection analysis

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Cited by 14 publications
(7 citation statements)
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“…Therefore, reducing the oxygen partial pressure in the deposition chamber can be a straight way to prevent or reduce the growth of oxide passive layers. 36 By looking at the tendency at Figure 3 from a previous article 22 and considering 21% of oxygen in the total pressure, it is straightforward to propose that the critical load of delamination (Lc in Newton) is inversely proportional to the oxygen coverage on the interfacial surface (σ in atoms•m −2 ) and for a fixed temperature, we have…”
Section: ■ Results and Discussionmentioning
confidence: 99%
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“…Therefore, reducing the oxygen partial pressure in the deposition chamber can be a straight way to prevent or reduce the growth of oxide passive layers. 36 By looking at the tendency at Figure 3 from a previous article 22 and considering 21% of oxygen in the total pressure, it is straightforward to propose that the critical load of delamination (Lc in Newton) is inversely proportional to the oxygen coverage on the interfacial surface (σ in atoms•m −2 ) and for a fixed temperature, we have…”
Section: ■ Results and Discussionmentioning
confidence: 99%
“…The kinetic theory of ideal gases describes that the amount of molecules that collide with a surface, r IG (eq ), at a constant temperature ( T ), is proportional to the pressure (P) as shown as follows: where k denotes the Boltzmann constant, T is the temperature (K), and m is the mass of an oxygen molecule.…”
Section: Results and Discussionmentioning
confidence: 99%
“…All experiments were carried out at a partial pressure of H 2 O and O 2 less than 3ϫ10 Ϫ5 Pa in order to suppress reoxidation from the ambient. 29 The samples were heated from the rear side using a boron nitride heater. The substrate temperature was measured by a thermocouple fixed into a hole drilled into the sample and kept constant within a͒ Author to whom correspondence should be addressed; electronic mail: t.fitz@fz-rossendorf.de Ϯ20°C during the process.…”
Section: Methodsmentioning
confidence: 99%
“…The surface binding energy of N in AlN is set to 9.1 eV according to the balance of fusion and atomization enthalpies. 29,34 The TRIDYN calculations were performed in a stationary mode, i.e., by assuming stoichiometric AlN that remains unaltered. For N ϩ ions, a simulation is performed with the ion beam energy of 1.6 keV.…”
Section: Methodsmentioning
confidence: 99%
“…Although many applications are in the so‐called “state‐of‐the‐art” models and quantitative understandings remain rather incomplete. In the last decade, however, several studies were reported discussing the role of oxygen, hydrogen, and deuterium in nitrogen implantation of metal alloys 2–4. Furthermore, the pioneer work of Parascandola et al has shown that oxygen acts as a potential barrier for nitrogen diffusion, diminishing the nitrogen incorporation into the bulk material 5,6.…”
Section: Introductionmentioning
confidence: 99%