The prevalence of gender wage gaps in academic work is well documented, but patterns of advantage or disadvantage linked to marital, motherhood, and fatherhood statuses have been less explored among college and university faculty. Drawing from a nationally representative sample of faculty in the US, we explore how the combined effects of marriage, children, and gender affect faculty salaries in science, engineering and mathematics (SEM) and non-SEM fields. We examine whether faculty members' productivity moderates these relationships and whether these effects vary between SEM and non-SEM faculty. Among SEM faculty, we also consider whether placement in specific disciplinary groups affects relationships between gender, marital and parental status, and salary. Our results show stronger support for fatherhood premiums than for consistent motherhood penalties. Although earnings are reduced for women in all fields relative to married fathers, disadvantages for married mothers in SEM disappear when controls for productivity are introduced. In contrast to patterns of motherhood penalties in the labor market overall, single childless women suffer the greatest penalties in pay in both SEM and non-SEM fields. Our results point to complex effects of family statuses on the maintenance of gender wage disparities in SEM and non-SEM disciplines, but married mothers do not emerge as the most disadvantaged group.