2021
DOI: 10.1007/s11664-021-09349-x
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The Intrinsic Thermoreflectance Property of 4H-SiC

Abstract: As the third-generation semiconductor material, silicon carbide (SiC), is extensively used in microelectronics devices. However, research on SiC in terms of thermoreflectance (TR) is relatively insufficient, so this paper aims to uncover the intrinsic TR property of 4H-SiC. In this paper, the light intensity values of 4H-SiC at different temperatures range from 40°C to 120°C; the temperature rise interval is 20°C, and different illumination wavelengths which range from 365 nm to 730 nm are measured by a self-m… Show more

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