2010 20th International Crimean Conference "Microwave &Amp; Telecommunication Technology" 2010
DOI: 10.1109/crmico.2010.5632761
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The investigation of regularities of the initial stages of nanoclusters' formation and of the upgrowth of the germanium-doped polycrystalline silicon nanostructural films

A. A. Kovalevskiy
1
,
V. M. Borisevich
2
,
А. С. Строгова
3
et al.
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