2000
DOI: 10.1088/0953-4075/33/9/304
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The ionization dynamics of SF6: a full dimensional directab initiodynamics study

Abstract: The ionization dynamics of SF 6 , which plays an important role in plasma dry etching of semiconductors, has been investigated by means of full dimensional direct ab initio dynamics calculations. The SF + 6 ion, formed by the vertical ionization of SF 6 , decomposes directly into SF + 5 and F without complex formation. The dynamics calculations showed that 22% of the total available energy is partitioned into the relative translational mode between SF + 5 and F. The mechanism of the ionization of SF 6 and the … Show more

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Cited by 9 publications
(12 citation statements)
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“…56 However, even ground state SF 6 + fragmentation is expected to proceed rapidly on the femtosecond time scale. 57 It is therefore reasonable to assume that the observed angular distribution reflects the dissociation axis angle with respect to the laser polarization.…”
Section: ■ Experimental Setupmentioning
confidence: 99%
“…56 However, even ground state SF 6 + fragmentation is expected to proceed rapidly on the femtosecond time scale. 57 It is therefore reasonable to assume that the observed angular distribution reflects the dissociation axis angle with respect to the laser polarization.…”
Section: ■ Experimental Setupmentioning
confidence: 99%
“… 4 According to an ab initio dynamics study, vertical ionization of isolated SF 6 produces F + SF 5 + fragments that will separate within 0.2 ps with ∼1.1 eV channeled into kinetic energy. 21 The challenge to the experimentalist is to quench this fierce reaction.…”
mentioning
confidence: 99%
“… 32 Upon pickup of SF 6 , the dopant and the charge will move toward each other through the superfluid medium; charge transfer will release ∼8.0 eV (see the Supporting Information ). Given the large (1.1 eV) energy that is channeled into the F + SF 5 + fragments upon vertical ionization, 21 and the disparity in the mass of F and He, whether the helium matrix can fully cage the products is questionable. However, all that is needed to stabilize SF 6 + is that the fluorine atom is, with some reasonable probability, thermalized and trapped in the HND.…”
mentioning
confidence: 99%
“…The degree of fragmentation of the compound can be seen directly from the mass spectrum. In this study, the pure SF 6 gas was detected by EIMS and EAMS, respectively, and the mass spectra results were shown in Figure 3 [22][23][24]. The molecular ion of SF 6 was further fragmented easily [25].…”
Section: Electron Attachment Mass Spectrometrymentioning
confidence: 83%