“…8,9 In 2 O 3 also possesses a few-nanometers-thick, two-dimensional surface electron accumulation layer (SEAL), the existence of which has been demonstrated by a downward band bending at the surface and the presence of quantized subbands. [11][12][13] The conductivity of the SEAL is a particularly important property for applications of In 2 O 3 as gas-sensing material 14 , facilitates the forma-tion of ohmic contacts but makes the formation of Schottky contacts challenging. 15 Various methods allow the modulation of the SEAL: A reduction of the SEAL carriers can be achieved by an oxygen plasma treatment of the surface at elevated temperatures 14,16,17 , by adsorption of oxidizing reactive species, such as O 2 and O 3 18 or by intentional compensating acceptor doping.…”