Phase transformations during selenization of thin films of elemental Cu, elemental In, and intermetallic Cu x In with x ¼ (1.8, 1.0, 0.8) are investigated using real-time energy dispersive X-ray diffraction. From the temporal development of the X-ray peak intensities, phase predominance sequence diagrams are constructed including the intensity ratio of the CuK a /InK a fluorescence lines. It was found that vapor selenization of Cu layers results in the formation of Cu 2Àx Se. At elevated temperature, linear growth of Cu 2Àx Se is observed which is interpreted as a surface controlled reaction mechanism. Indium selenization proceeds via the phase sequence In 4 Se 3 -InSe-In 2 Se 3 . During Cu x In selenization, the transformation sequence towards more Cu-rich intermetallic phases CuIn 2 -Cu 11 In 9 and Cu 11 In 9 -Cu 16 In 9 precedes the selenization process. During selenization of precursors with x41.4, this sequence continues bringing up the intermetallic phases Cu 7 In 3 and a-CuIn. The latter are formed at the bottom of the films. Thus, the bottom of the film becomes depleted from Indium by In diffusion. In general, the selenization process is slower than the sulfurization processes investigated in Part 2 of this study. A model is proposed which includes Cu 2Àx Se as a preliminary precursor for CuInSe 2 growth. This Cu 2Àx Se formation at the surface of the films is proposed to be surface reaction limited and is proposed to be the limiting step for the CuInSe 2 formation. Precursors with xp1 transform into CuInSe 2 with the participation of In-Se phases. r