The Kinetics of the Change of SnO_xThin Films Conductivity during the Gas-Adsorptive Interaction

Abstract

The subjects of investigation are thin semiconductor SnOx lms received by thermal oxidation. The inuence of gas environments on electrical conductivity of lms were investigated by a static way by measurement of kinetic and equilibrium isotherm of adsorption of trimethylamine, alcohol, hydrogen sulde and ammonia. The communication between a type isotherm of adsorption, chemical nature of gas and temperature is shown.