The LIGA technique-A novel concept for microstructures and the combination with Si-technologies by injection molding

Menz, Wolfgang; Bacher, W.; Harmening, Marc; Michel, A.

doi:10.1109/memsys.1991.114771

Cited by 64 publications

(29 citation statements)

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“…In applications requiring metal-based or polymerbased microscale structures, the Lithographie, Galvanoformung, Abformung (LIGA) process is the preferred fabrication technology. The LIGA process, first developed using X-ray lithography of PMMA (Menz et al 1991;Mohr et al 1992;El-Kholi et al 1993;Kondo et al 1998;Ehrfeld and Schmidt 1998;Henry et al 1999;Guckel et al 2000;Singleton et al 2002;Schulz and Bade et al 2004;Heckele and Schomburg 2004), has been used to fabricate high-aspect-ratio microscale structures (HARMS) for applications in mechanical, electrical, chemical, and biomedical devices and systems (Menz et al 1991;Mohr et al 1992;El-Kholi et al 1993;Kondo et al 1998;Ehrfeld and Schmidt 1998;Henry et al 1999;Guckel et al 2000;Singleton et al 2002;Schulz and Bade et al 2004;Heckele and Schomburg 2004), including micro accelerator (Qu et al 1999), RF inductor (Sadler et al 2001), micro mixer/reactor (Yang et al 2004), polymerase chain reaction (PCR) system (Hupert and Witek 2003), and others. The molding replication step of the three-step LIGA process of lithography, electrodeposition, and molding is the most important for low-cost HARMS production.…”

Section: Introductionmentioning

confidence: 99%

Numerical simulation and fabrication of microscale, multilevel, tapered mold inserts using UV-Lithographie, Galvanoformung, Abformung (LIGA) technology

2006

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Techniques for economic fabrication of highaspect-ratio microscale structures (HARMS) are being investigated intensely. Microdevices employing metalbased HARMS are of particular interest for mechanical, electro-mechanical, and chemical applications. In many applications, HARMS with two or more heights are needed. Fabrication of these multi-level HARMS by compression molding requires two-level or multi-level mold inserts. In addition, tapered mold inserts would help achieving easy insert-part separation. This paper reports a process for fabricating two-level tapered mold inserts by combining UV-lithography of SU-8 resist, one-step metal electrodeposition, polish and level, followed by SU-8 resist removal. Without tilting and rotation during the lithography step, tapered plating molds are obtained by employing characteristics of UVlithography and resist development. The SU-8 removal method used does not reduce the strength of the electrodeposited mold insert. Efficacy of our approach is demonstrated with a two-level mold insert prototype.

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Section: Introductionmentioning

confidence: 99%

Numerical simulation and fabrication of microscale, multilevel, tapered mold inserts using UV-Lithographie, Galvanoformung, Abformung (LIGA) technology

2006

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“…In particular, the LIGA (a German acronym meaning synchrotron radiation, electroforming, and plastic molding) process is desirable because it is capable of producing microdevices with high aspect ratios, highly parallel edges, and micrometer-scale precision (Menz et al 1991). In the process, an x-ray resist is first exposed through a lithographic mask and developed in an organic developer, forming a lateral-shaped polymeric pattern.…”

Section: Micromechanical Fabricationmentioning

confidence: 99%

Application of an environmental scanning electron microscope to micromechanical fabrication

Paul

Klimkiewicz

1996

Scanning

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Summary: Current advanced methods of micromechanical fabrication require expensive tooling or are restricted to the fabrication of lateral-shaped microstructures. To overcome these limitations, recent efforts have used microscale additive freeform fabrication (AFF) methods to prototype micromechanical structures. However, these laser-based methods are limited in resolution. To improve the resolution of microscale AFF methods, an environmental scanning electron microscope (ESEM) was used to prototype several electron-beam (EB)-based microscale AFF processes. The results showed that the ESEM is capable of demonstrating process feasibility for EB-based microscale AFF.

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“…15,16 The mass transfer coefficients of packed-bed reactors at this size scale have been experimentally shown to be multiple orders of magnitude greater than their macroscale counterparts. 17 However, three-dimensional microfabrication techniques such as LIGA, 18 UV lithography using SU-8 photoresist, 19 microstereolithography, 20 and multistep rapid prototyping 21 present limitations in the maximum thickness, surface area, 22 production costs and creation of three-dimensional complexity, thereby restricting the range of possible Reynolds numbers and reagent quantities. Microfluidic benefits also apply for macroscale fluid volumes moving through microscale channels or openings.…”

Section: Introductionmentioning

confidence: 99%

Fluid dynamics of flow through microscale lattice structures formed from self‐propagating photopolymer waveguides

et al. 2010

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The fluid dynamics of flow through microscale lattice structures is characterized for different unit cell sizes, flow angles, and flow rates. The structures consist of an octahedral‐type periodic unit cell, which is formed from an interconnected pattern of self‐propagating photopolymer waveguides. The periodic unit cell of each sample has a node‐to‐node spacing between 800 and 2400 μm and a truss member diameter between 148 and 277 μm. Water is directed through the microscale lattice structures, and the resulting pressure drop is investigated for two different flow angles and superficial flow rates between 0.5 and 4.8 L/min. Finite element analysis is used to determine pressure drop in the laminar flow regime. The results are used to develop a correlation describing friction factor as a function of flow direction, geometric characteristics, and Reynolds number. This work enables control of the fluid dynamics in microarchitected multifunctional truss materials through design and superficial flow angle. © 2010 American Institute of Chemical Engineers AIChE J, 2011

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The LIGA technique-A novel concept for microstructures and the combination with Si-technologies by injection molding

Cited by 64 publications

References 1 publication

Numerical simulation and fabrication of microscale, multilevel, tapered mold inserts using UV-Lithographie, Galvanoformung, Abformung (LIGA) technology

Numerical simulation and fabrication of microscale, multilevel, tapered mold inserts using UV-Lithographie, Galvanoformung, Abformung (LIGA) technology

Application of an environmental scanning electron microscope to micromechanical fabrication

Fluid dynamics of flow through microscale lattice structures formed from self‐propagating photopolymer waveguides

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