The electron energy band alignment between (100)Si and several complex transition/rare earth (RE) metal oxides (LaScO 3 , GdScO 3 , DyScO 3 , and LaAlO 3 , all in amorphous form) is determined using a combination of internal photoemission and photoconductivity measurements. The band gap width is nearly the same in all the oxides ͑5.6-5.7 eV͒ yielding the conduction and valence band offsets at the Si/oxide interface of 2.0± 0.1 and 2.5± 0.1 eV, respectively. However, band-tail states are observed and these are associated with Jahn-Teller relaxation of transition metal and RE cations which splits their d* states.