The long path from MEMS resonators to timing products

Ng, Eldwin J.; Yang, Yushi; Hong, Vu A.; Ahn, Chang-Nam; Heinz, David B.; Flader, Ian B.; Chen, Y.; Everhart, Camille L. M.; Kim, B.; Melamud, R.; Candler, Robert N.; Hopcroft, Matthew A.; Salvia, J.; Yoneoka, S.; Graham, A.B.; Agarwal, M.; Messana, M.W.; Chen, K.L.; Lee, H.K.; Wang, S.; Bahl, Gaurav; Qu, V.; Chiang, Chia-Fang; Kenny, Thomas W.; Partridge, A.; Lutz, Markus; Yama, G.; O'Brien, G.J.

doi:10.1109/memsys.2015.7050869

Cited by 25 publications

(16 citation statements)

References 14 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…For over a decade, MEMS resonator-based oscillators have moved towards commercialization for timing applications [ 8 , 10 , 12 , 197 , 198 ], mainly focusing on wired communications standards such as USB and on real-time clocks. The reason why MEMS oscillators are more slowly penetrating RF systems as frequency references is due to their fairly stringent phase noise requirements.…”

Section: Applicationsmentioning

confidence: 99%

“…This is lower than the Q-factors achieved by AT-cut crystals, which are typically in the range of 10 4 –10 5 over a wide range of frequencies. Furthermore, the resonant frequency temperature dependence of an uncompensated MEMS silicon resonator is much higher (−30 ppm/°C [ 197 ]) than that of an AT-cut crystal (±25 ppm from −40 to 85 °C). Mechanical or electronic temperature compensation is thus a must for MEMS resonators to match quartz temperature stability, a critical parameter in all timing applications.…”

Section: Applicationsmentioning

confidence: 99%

See 1 more Smart Citation

Micromachined Resonators: A Review

et al. 2016

View full text Add to dashboard Cite

This paper is a review of the remarkable progress that has been made during the past few decades in design, modeling, and fabrication of micromachined resonators. Although micro-resonators have come a long way since their early days of development, they are yet to fulfill the rightful vision of their pervasive use across a wide variety of applications. This is partially due to the complexities associated with the physics that limit their performance, the intricacies involved in the processes that are used in their manufacturing, and the trade-offs in using different transduction mechanisms for their implementation. This work is intended to offer a brief introduction to all such details with references to the most influential contributions in the field for those interested in a deeper understanding of the material.

show abstract

Section: Applicationsmentioning

confidence: 99%

Section: Applicationsmentioning

confidence: 99%

Micromachined Resonators: A Review

et al. 2016

View full text Add to dashboard Cite

show abstract

“…One of the early motivations of RF MEMS was the potential of developing extremely low-power radios by utilizing the high quality mechanical resonance characteristics of micromachined resonators, which are superior to their electronic counterparts by orders of magnitude. The fxQ product for MEMS resonators has continued to improve [5], and nowadays MEMS resonators are used in commercial applications, primarily as timing units, and increasingly in other communication functions [22]. The high Q is a clear advantage for reducing power dissipation.…”

Section: Wireless Interfacesmentioning

confidence: 99%

Wireless Integrated Micro Systems (Wims): Past, Present, Future

Najafi¹

2018

2018 Solid-State, Actuators, and Microsystems Workshop Technical Digest

View full text Add to dashboard Cite

Wireless integrated microsystems (WIMS), also referred to with many names such as IoT/IoE, sensor nodes/motes, or smart nodes, represent portable and stand-alone devices that contain sensors, actuators, signal processing electronics, communication electronics, packaging, and power sources. During the past few years they have become an instrumental part of extending the microelectronics revolution that started many decades ago with the advent of integrated circuits. This paper reviews the past achievements in sensors/actuators, low-power electronics, wireless interfaces, packaging, and provides a perspective on the future trends in both technology and applications for these sensing microsystems and high-performance micro-instruments.

show abstract

“…Nowadays, wireless communication systems are developing towards higher frequency, narrow channel, multiband and multimode [ 1 , 2 ], which requires high performance, high integration, and low power consumption resonators as time reference devices [ 3 , 4 ]. So far, the quartz crystals are widely used in wireless communications.…”

Section: Introductionmentioning

confidence: 99%

A Novel High Q Lamé-Mode Bulk Resonator with Low Bias Voltage

et al. 2020

View full text Add to dashboard Cite

This work reports a novel silicon on insulator (SOI)-based high quality factor (Q factor) Lamé-mode bulk resonator which can be driven into vibration by a bias voltage as low as 3 V. A SOI-based fabrication process was developed to produce the resonators with 70 nm air gaps, which have a high resonance frequency of 51.3 MHz and high Q factors over 8000 in air and over 30,000 in vacuum. The high Q values, nano-scale air gaps, and large electrode area greatly improve the capacitive transduction efficiency, which decreases the bias voltage for the high-stiffness bulk mode resonators with high Q. The resonator showed the nonlinear behavior. The proposed resonator can be applied to construct a wireless communication system with low power consumption and integrated circuit (IC) integration.

show abstract

The long path from MEMS resonators to timing products

Cited by 25 publications

References 14 publications

Micromachined Resonators: A Review

Micromachined Resonators: A Review

Wireless Integrated Micro Systems (Wims): Past, Present, Future

A Novel High Q Lamé-Mode Bulk Resonator with Low Bias Voltage

Contact Info

Product

Resources

About