The Method of Waveguide-Junction Resonance for Integrated Ferroelectric Films Investigation

Abstract

The advances in integratedferroelectricfilms applications stimulate new techniques forfilm quality examinations and its processing reliable control. Being non-electrode and in most cases non-contact, microwave methods are indestructive so the dada aboutferroelectricfilm quality could be obtained at various stages ofintegral film processing. A new fixture for ferro-and paraelectric films microwave investigations, based on junction "round waveguides -a radial waveguide " is proposed. For creating a fixture design theoretical base, a rigorous solution qf the eigen axially-symmetrical H o p, -mode of waveguide junction containing two dielectric layers is obtained.The electrodynamic computation of this structure has been carried out by the field superposition method. The principal advantage of this test method is in the local measuring of a large range offerroelectric integrated films having no sizes limitation.