The surfaces of soft polyurethanes (with elastic moduli of 7 and 50 MPa) treated by plasma immersion ion implantation were studied; the materials became hard and wrinkled. The characteristics of the modified surface (modulus, roughness, wave and fractal parameters, linear deformation) and the cross‐sectioned layer were studied in relation to the treatment regime and the modulus of the polymer. A hypothesis that the wrinkling was solely caused by thermal expansion was checked but rejected. The cross‐section of the treated material had a hard part of a certain thickness and a transition zone. The elastic modulus of the hard part was estimated by the finite element method. A comparison of the obtained thicknesses with calculations by TRIM software indicated that the latter gave underestimated results. © 2017 Wiley Periodicals, Inc. J. Appl. Polym. Sci. 2018, 135, 45983.