The multipole resonance probe: simultaneous determination of electron density and electron temperature using spectral kinetic simulation

Abstract

The Multipole Resonance Probe (MRP) is an innovative sensor suitable for monitoring and control of industrial plasma processes. It is a realization of “active plasma resonance spectroscopy”, a class of electromagnetic diagnostic methods which employ the ability of plasmas to resonate on or near the plasma frequency. A signal in the GHz range is fed to the plasma via an electrical probe; the spectral response S(ω) is recorded, and then evaluated with a mathematical model to obtain information on the internal plasma parameters. In this study, a spectral kinetic model of the MRP is discussed. It is superior to previous analyses based on the Drude model, as it allows to determine not only the electron density ne but also the electron temperature Te from S(ω). Good agreement with independent measurements shows the suitability of the model.