1994
DOI: 10.1016/0257-8972(94)90178-3
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The multisource arc process for depositing ternary Cr- and Ti-based coatings

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Cited by 18 publications
(5 citation statements)
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“…Ternary Cr 1Àx Al x N-or multinary Cr 1Àx Al x N-based thin films, where Al substitutes for Cr, are of increasing industrial importance due to good mechanical properties in combination with excellent corrosion and oxidation resistance (43,70,86,120,(126)(127)(128). Therefore, they are widely used as abrasion-resistant layers in automotive industry (e.g., valves, tappets, and camshafts) or as protective coatings for forming and machining tools (94,(129)(130)(131)(132)(133)(134).…”
Section: Coatings Within the Cr-al-n Systemmentioning
confidence: 99%
“…Ternary Cr 1Àx Al x N-or multinary Cr 1Àx Al x N-based thin films, where Al substitutes for Cr, are of increasing industrial importance due to good mechanical properties in combination with excellent corrosion and oxidation resistance (43,70,86,120,(126)(127)(128). Therefore, they are widely used as abrasion-resistant layers in automotive industry (e.g., valves, tappets, and camshafts) or as protective coatings for forming and machining tools (94,(129)(130)(131)(132)(133)(134).…”
Section: Coatings Within the Cr-al-n Systemmentioning
confidence: 99%
“…The latter two options have the advantage that fabrication of costly sintered cathodes is avoided while composition control is possible by adjusting the current of the individual cathodes. This has been demonstrated with Ti, Al, and Cr arc sources, producing coatings within the systems Ti-Al-N, Ti-Cr-N and Cr-Al-N [22]. The underlying idea is to identify film material systems that show superior performance based on spinodal decomposition, similar to the 10.2 Nitride Coatings for Wear Applications well-established TiAlN system.…”
Section: Other Ternary and Quaternary Nitrides Carbides And Nanocommentioning
confidence: 93%
“…CrAl-based and AlCr-based coatings are deposited by reactive direct vacuum arc using either elemental cathodes or composite cathodes. The first (CrAl)N and (AlCr)N coatings were deposited by the reactive co-evaporation of elemental chromium and aluminium cathodes available at that time [17][18][19].…”
Section: Arc Deposition Methodsmentioning
confidence: 99%
“…In the same year, coatings with an Al/(Al + Cr) composition of about 0.5 deposited using a modified hollow cathode discharge process were also presented [16]. Arc evaporation was used to deposit (AlCr)N coatings with a high Al content with an (Al/(Al + Cr) ratio of >0.5 [17,18]. The first multilayer coating with an Al content greater than the Cr content was a multilayer architecture with CrN [19].…”
Section: Introductionmentioning
confidence: 99%