The Nanogate: nanoscale flow control

White, J.; Ma, Hongshen; Lang, Jeffrey H.; Slocum, Alex

doi:10.1109/mems.2004.1290609

Cited by 5 publications

(8 citation statements)

References 11 publications

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“…Such a gap can be used to study physical phenomena at sub-micron scales, such as radiative heat transfer or force interactions such as Casimir forces that occur between metals [2]. Other example applications include size-based filtration for macromolecular separations [1] and characterization of electrochemical properties of gas and liquid molecules [3].…”

Section: Problem Overviewmentioning

confidence: 99%

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Integrated Design and Control of Flexure-Based Nanopositioning Systems — Part I: Methodology

Shilpiekandula¹

2011

IFAC Proceedings Volumes

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Flexure-based mechanisms, also referred to as flexures, are widely being used as motion-guidance, or bearing, elements in applications requiring multi-degree-of-freedom positioning and alignment. Unlike friction-bearings (such as sliding or rolling contact bearings), flexures can be designed to offer, to a large extent, reliable linear elastic motion with a high resolution (on the order of nanometers) over small ranges of motion (on order of micrometers). Example applications include positioning a probe or sample in atomic force microscopy, alignment of tool and sample in stamping processes, and fine-positioning of wafer steppers in semiconductor manufacturing. These applications are often required satisfy critical functional requirements, such as load-capacity, bandwidth, resolution, and range. A systematic approach is needed to simultaneously address the design and control challenges involved, starting from the initial design concept generation stage to the final control implementation and testing. In this paper, we present an integrated design and control method for implementing flexurebased nanopositioning systems. We discuss the need for varying design topology and order of a controller in design and control optimization. An automation engine generates a set of flexurebased design topologies and also controllers of varying order in the optimization. A simple 1-DOF example is worked out to illustrate the steps involved in using this methodology. The outcome of the exercise is a novel design topology, with it shape and size optimized, and a controller synthesized such that a desired control bandwidth and design requirements of strength and modal separation are met. World Congress of the International Federation of Automatic ControlThis work may not be copied or reproduced in whole or in part for any commercial purpose. Permission to copy in whole or in part without payment of fee is granted for nonprofit educational and research purposes provided that all such whole or partial copies include the following: a notice that such copying is by permission of Mitsubishi Electric Research Laboratories, Inc.; an acknowledgment of the authors and individual contributions to the work; and all applicable portions of the copyright notice. Copying, reproduction, or republishing for any other purpose shall require a license with payment of fee to Mitsubishi Electric Research Laboratories, Inc. All rights reserved. Abstract: Flexure-based mechanisms, also referred to as flexures, are widely being used as motion-guidance, or bearing, elements in applications requiring multi-degree-of-freedom positioning and alignment. Unlike friction-bearings (such as sliding or rolling contact bearings), flexures can be designed to offer, to a large extent, reliable linear elastic motion with a high resolution (on the order of nanometers) over small ranges of motion (on order of micrometers). Example applications include positioning a probe or sample in atomic force microscopy, alignment of tool and sample in stamping processes, and ...

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Section: Problem Overviewmentioning

confidence: 99%

“…These advantages make flexure-based mechanisms, also referred to as flexures, ideal candidates for precision motion control implementations. 1 Corresponding author: svijay@mit.edu…”

Section: Introductionmentioning

confidence: 99%

Integrated Design and Control of Flexure-Based Nanopositioning Systems — Part I: Methodology

Shilpiekandula¹

2011

IFAC Proceedings Volumes

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“…1. The resonator design was based on classical precision-mechanism design principles [12], [13], resulting in a simplified manufacturing process, and excellent mechanical and electrical performance. The resonator consists of a copper cavity loaded by a capacitive gap.…”

Section: Introductionmentioning

confidence: 99%

Octave-tunable miniature RF resonators

White

Slocum

2005

IEEE Microw. Wireless Compon. Lett.

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Abstract-The development and testing of a miniaturized, high-, broadly tunable resonator is described. An exemplary device, with a center frequency that is continuously tunable from 1.2 to 2.6 GHz, was tested in detail. Experimental results demonstrated a resonator of up to 380, and typical insertion loss of 1.9 dB for a 25 MHz 3-dB bandwidth. These resonators have been used to stabilize a broadly-tunable oscillator with phase noise of 132 dBc/Hz at 100-kHz offset, with a center frequency tunable from 1.2-2.6 GHz, and a tuning speed of 1 GHz/ms. Index Terms-Microelectromechanical system (MEMS), resonators, voltage controllable oscillators (VCOs).

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“…Implementations of size-based separations, reported recently ( [5] and [6]), use an adjustable gap between two flat parallel plates to pass through only particles of size smaller than the gap height. In [5], the gap has been implemented for gas and liquid flow through a 0.2 nm separation of two millimeter-scale polished surfaces.…”

Section: Introductionmentioning

confidence: 99%

Modeling and control of a programmable filter for separation of biologically active molecules

Shilpiekandula

Proceedings of the 2005, American Control Conference, 2005.

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We present the modeling and control of a programmable filter applicable to the separation of biologically active molecules like proteins and DNA. Conventional methods of separation are bulky, costly and time-intensive. We propose a diaphragm valve design that can filter molecules based on their size by controlling a narrow gap formed between two flat parallel plates. Modeling and experiments performed on a prototype implementation of the gap are presented. Preliminary tests performed on our closed-loop control system indicate that a resolution of 0.2 nm can be achieved for the gap size. Further, to account for any tilt between the plates, we propose the design of a flexure that can compensate for the tilt and ensure the formation of a uniform gap. Dynamic modeling of the flexure and simulations of the tilt-compensation are presented.

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The Nanogate: nanoscale flow control

Cited by 5 publications

References 11 publications

Integrated Design and Control of Flexure-Based Nanopositioning Systems — Part I: Methodology

Integrated Design and Control of Flexure-Based Nanopositioning Systems — Part I: Methodology

Octave-tunable miniature RF resonators

Modeling and control of a programmable filter for separation of biologically active molecules

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