The new mechanism of sputtering with cluster ion beams

Chernysh, V. S.; Ieshkin, A. E.; Ermakov, Yu. A.

doi:10.1016/j.apsusc.2014.12.008

Cited by 18 publications

(17 citation statements)

References 10 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…5 Off-normal ejection also has been measured for intact benzopyrene molecules during C 60 bombardment, 6 although the effect is not as pronounced as observed for large Ar clusters. Recent experiments of Chernysh et al performed with Ar gas cluster projectiles on several polycrystalline metals and alloys, 7,8 in general, have confirmed observations of Yamada et al However, a different shape of angular distributions was observed when Mo and W surfaces were bombarded with 10 keV Ar 800 . For these particular systems, angular spectra peak along the surface normal.…”

Section: Introductionmentioning

confidence: 63%

“…1. Unfortunately, because of a very low signal, angular emission of Mo atoms at conditions used in experiments of Chernysh et al 7,8 could not be investigated. Even for 400 impacts of 10 keV Ar 1000 , a total ejection of barely nine molybdenum atoms is observed thus no reliable conclusions can be drawn.…”

Section: A Effect Of the Projectile Sizementioning

confidence: 99%

“…A silver sample is selected to probe topography effects on angular emission using the roughened sample obtained in our previous study. 9 A molybdenum sample is chosen to probe hypothesis of springlike ejection mechanism proposed by Chernysh et al 7,8…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Computer modeling of angular emission from Ag(100) and Mo(100) surfaces due to Arn cluster bombardment

Maciążek

Kański

Gaza

et al. 2016

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

View full text Add to dashboard Cite

Defects and morphological changes in nanothin Cu films on polycrystalline Mo analyzed by thermal helium desorption spectrometry Molecular dynamics computer simulations are employed to investigate the effect of projectile size and surface morphology on the angular emission stimulated by impact of Ar gas cluster projectiles. Argon clusters of sizes n ¼ 10-1000 and kinetic energies of 10 and 20 keV Ar n aimed at normal incidence are used to sputter Ag(100) and Mo(100) samples. The total sputtering yield is larger for Ag(100) than for Mo(100). The ratio of sputtering yields is inversely proportional to the ratio of sublimation energies of these solids for projectiles between Ar 20 and Ar 250 . In both systems, the angular distributions are sensitive to both the projectile size and the surface roughness. The maximum of angular spectra shifts from direction normal to the surface toward off-normal direction with the increase in the projectile size. An opposite trend is observed with the increase in the surface roughness. Formation of a cloud composed of projectile atoms and the enhanced lateral material relocation caused by projectile lateral expansion upon impact are the main factors responsible for promoting off-normal ejection. On the other hand, material ejection from randomly inclined surface areas and the influence of nearby topography are found to be responsible for enhancing ejection along the surface normal for rough surfaces.

show abstract

Section: Introductionmentioning

confidence: 63%

Section: A Effect Of the Projectile Sizementioning

confidence: 99%

See 1 more Smart Citation

Computer modeling of angular emission from Ag(100) and Mo(100) surfaces due to Arn cluster bombardment

Maciążek

Kański

Gaza

et al. 2016

Journal of Vacuum Science &Amp; Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phen

View full text Add to dashboard Cite

show abstract

“…The principle for sputtering with individual Ar atoms has been well described36. GCIS is particularly attractive to gently remove the top layers of fragile organic materials37383940. It has been used in conjunction with XPS to explore the depth distribution of atoms41.…”

Section: Methodsmentioning

confidence: 99%

Trapping gases in metal-organic frameworks with a selective surface molecular barrier layer

et al. 2016

View full text Add to dashboard Cite

The main challenge for gas storage and separation in nanoporous materials is that many molecules of interest adsorb too weakly to be effectively retained. Instead of synthetically modifying the internal surface structure of the entire bulk—as is typically done to enhance adsorption—here we show that post exposure of a prototypical porous metal-organic framework to ethylenediamine can effectively retain a variety of weakly adsorbing molecules (for example, CO, CO2, SO2, C2H4, NO) inside the materials by forming a monolayer-thick cap at the external surface of microcrystals. Furthermore, this capping mechanism, based on hydrogen bonding as explained by ab initio modelling, opens the door for potential selectivity. For example, water molecules are shown to disrupt the hydrogen-bonded amine network and diffuse through the cap without hindrance and fully displace/release the retained small molecules out of the metal-organic framework at room temperature. These findings may provide alternative strategies for gas storage, delivery and separation.

show abstract

“…Широкое распростране-ние получило применение ионных пучков кластеров газовых атомов (GCIB) [28] для модификации/очистки поверхности, послойного анализа и осаждения тонких пленок, берущее начало с классической работы [29]. Однако и сейчас развитие, в том числе моделирова-ние, методики GCIB, включая пучки кластеров аргона для обработки различных поверхностей, является тех-нологически [30][31][32] и академически [33] актуальным. В настоящей работе исследованы свободные двудольные биметаллические кластеры Ni−Al и Cu−Au, состоящие из 390 атомов, под действием бомбардировки моно-энергетическими кластерами аргона различных разме-ров, обладающими энергиями от 1 eV до 1.4 keV.…”

Section: Introductionunclassified

Моделирование Взаимодействия Двудольных Биметаллических Кластеров С Низкоэнергетическими Кластерами Аргона

Shirokorad¹,

Kornich²,

Буга³

2017

Физика Твердого Тела

View full text Add to dashboard Cite

Выполнено молекулярно-динамическое моделирование эволюции двудольных биметаллических кластеров, состоящих из 390 атомов, при бомбардировке кластерами Arn (n = 1, 2, 13) с начальной энергией от 1 eV до 1.4 keV. В качестве мишени использовались бинарные кластеры Cu−Au и Ni−Al, состоящие из равных по количеству атомов долей соответствующих элементов. В результате моделирования получены температуры, изменения потенциальной энергии, выходы распыления, а также интенсивности столкновительно-стиму-лированных перемещений атомов через границу раздела монометаллических частей бинарных кластеров в зависимости от энергии и размера налетающей частицы.Работа выполнена в рамках соглашения № 14.580.21.0003 (уникальный идентификатор проекта RFMEFI58015X0003) при финансовой поддержке Министерства образования и науки РФ (С.Г.Б.).

show abstract

The new mechanism of sputtering with cluster ion beams

Cited by 18 publications

References 10 publications

Computer modeling of angular emission from Ag(100) and Mo(100) surfaces due to Arn cluster bombardment

Computer modeling of angular emission from Ag(100) and Mo(100) surfaces due to Arn cluster bombardment

Trapping gases in metal-organic frameworks with a selective surface molecular barrier layer

Моделирование Взаимодействия Двудольных Биметаллических Кластеров С Низкоэнергетическими Кластерами Аргона

Contact Info

Product

Resources

About