“…Due to its fine tunable electrical and optical properties by plasma parameters, hydrogenated amorphous silicon carbide films have attracted a great interest and have been used in many kinds of optoelectronic devices, such as solar cell windows layer, color sensors, and thin film light emitting and detecting devices [1][2][3][4][5]. Crystalline SiC compared to its amorphous counterpart has been considered to be a promising semiconductor material to operate at high temperature, high power, high frequency, and high radiation environment due to its good electrical and mechanical characteristics such as electron mobility (1000 cm 2 /V s), electron saturation velocity (2.0-2.7 · 10 7 cm/s), break electronic field (2-3 · 10 6 V/cm), high melting point and high thermal conductivity [6].…”