“…The other thermodynamically stable oxide is the high temperature phase CoO which crystallizes in a rock salt structure. Thin films of Co 3 O 4 have been deposited using a wide variety of deposition methods such as reactive electron-beam evaporation, [1] sputtering, [7,11] pulsed laser deposition, [12] electrodeposition, [3,13] spray pyrolysis, [2,5,14] sol-gel processes, [15] various modes of CVD, [6,[16][17][18] and ALD from metal-organic precursors. [19] The ALD technique might be regarded as a pulsed-CVD technique, where the precursors are introduced, separated in time and space, and then the film growth is achieved through selflimiting surface reactions.…”