The Optimal Shape of MEMS Beam Under High-G Shock Based on a Probabilistic Fracture Model

Peng, Tianfang; You, Zheng

doi:10.1109/irps48227.2022.9764507

Cited by 4 publications

(2 citation statements)

References 18 publications

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“…Common shock-resistant designs encompass optimized beam structures, buffer structures, energy dissipation mechanisms, and shock-protected packaging [11][12][13]. Peng et al conducted shape optimization on MEMS cantilevers, comb structures, island beams, and folded beams, resulting in a 13-79% improvement in various shock resistance properties of MEMS inertial devices [14]. In terms of energy dissipation, researchers have proposed various shock absorber materials with a low coefficient of restitution (COR) as contact materials [15].…”

Section: Introductionmentioning

confidence: 99%

Design of a Shock-Protected Structure for MEMS Gyroscopes over a Full Temperature Range

Xu,

Lin,

et al. 2024

Micromachines

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Impact is the most important factor affecting the reliability of Micro-Electro-Mechanical System (MEMS) gyroscopes, therefore corresponding reliability design is very essential. This paper proposes a shock-protected structure (SPS) capable of withstanding a full temperature range from −40 °C to 80 °C to enhance the shock resistance of MEMS gyroscopes. Firstly, the shock transfer functions of the gyroscope and the SPS are derived using Single Degree-of-Freedom and Two Degree-of-Freedom models. The U-folded beam stiffness and maximum positive stress are deduced to evaluate the shock resistance of the silicon beam. Subsequently, the frequency responses of acceleration of the gyroscope and the SPS are simulated and analyzed in Matlab utilizing the theoretical models. Simulation results demonstrate that when the first-order natural frequency of the SPS is approximately one-fourth of the gyroscope’s resonant frequency, the impact protection effect is best, and the SPS does not affect the original performance of the gyroscope. The acceleration peak of the MEMS gyroscope is reduced by approximately 23.5 dB when equipped with the SPS in comparison to its counterpart without the SPS. The anti-shock capability of the gyroscope with the SPS is enhanced by approximately 13 times over the full-temperature range. After the shock tests under the worst case, the gyroscope without the SPS experiences a beam fracture failure, while the performance of the gyroscope with the SPS remains normal, validating the effectiveness of the SPS in improving the shock reliability of MEMS gyroscopes.

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Section: Introductionmentioning

confidence: 99%

Design of a Shock-Protected Structure for MEMS Gyroscopes over a Full Temperature Range

Xu,

Lin,

et al. 2024

Micromachines

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“…Moreover, they did not discuss the relationship between the shock and the response in detail, but only qualitatively. In fact, most analytical studies on microstructure mechanics have focused on a class of devices represented by microbeams [ 13 , 25 , 26 , 27 , 28 ], with little study on MEMS suspended inductors. Therefore, the situation calls for an accurate analytical method to analyze the response of the MEMS inductor under shock and to determine whether the inductor has failed since understanding the dynamics of a device is critical to determine its failure.…”

Section: Introductionmentioning

confidence: 99%

Mechanical Response of MEMS Suspended Inductors under Shock Using the Transfer Matrix Method

Zheng

2023

Micromachines

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MEMS suspended inductors are susceptible to deformation under external forces, which can lead to the degradation of their electrical properties. The mechanical response of the inductor to a shock load is usually solved by a numerical method, such as the finite element method (FEM). In this paper, the transfer matrix method of linear multibody system (MSTMM) is used to solve the problem. The natural frequencies and mode shapes of the system are obtained first, then the dynamic response by modal superposition. The time and position of the maximum displacement response and the maximum Von Mises stress are determined theoretically and independently of the shock. Furthermore, the effects of shock amplitude and frequency on the response are discussed. These MSTMM results agree well with those determined using the FEM. We achieved an accurate analysis of the mechanical behaviors of the MEMS inductor under shock load.

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Reliability of MEMS inertial devices in mechanical and thermal environments: A review

Xu,

Liu,

et al. 2024

Heliyon

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The Optimal Shape of MEMS Beam Under High-G Shock Based on a Probabilistic Fracture Model

Cited by 4 publications

References 18 publications

Design of a Shock-Protected Structure for MEMS Gyroscopes over a Full Temperature Range

Design of a Shock-Protected Structure for MEMS Gyroscopes over a Full Temperature Range

Mechanical Response of MEMS Suspended Inductors under Shock Using the Transfer Matrix Method

Reliability of MEMS inertial devices in mechanical and thermal environments: A review

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