The high temperature makes electronic components bear excessive thermal loads, which significantly degrade the performance of devices. The thermal issues in technological applications, such as DNA microarrays and micro-electrothermal systems, have been addressed by using high performance thermoelectric cooler. In this paper, a folded structure of thermoelectric elements with Bi 2 Te 3 -based thin-film superlattices (TFSL) material is proposed. The folded structure makes the minimum thickness of the thermocouples as low as 30 μm. Also, the passing electrical current induced by the thin thickness can be decreased to milliampere order of magnitude from ampere with traditional structure. The temperature difference between the hot and cold sides of thermoelectric cooler (TEC) is improved up to 2-16 times than that of the conventional structure. The proposed structure model agreed well with simulation results for relationships between temperature difference and sizes of thermocouples. The presented folded construction with thin-film superlattices materials can provide a viable solution for high-power, as well as high heat flow density device cooling. For state-of-the-art high-performance electronic devices, the generated overloads heat can result in high temperature hot-spots, which will significantly reduce the lifetime of devices. By integrating thermoelectric cooler devices, the peak temperature of these hot-spots can be targeted and eliminated. Compared with the conventional cooling solutions with inefficiency and hulking features, thermoelectric cooler with high cooling capacity and easy integration can apparently improve the performance and reliability of electric devices and optoelectronic components.1-3 Moreover, due to the absence of moving parts or working fluids, thermoelectric cooling technology has been used practically in fields of aerospace, 4,5 medicine, 6,7 vehicles 8,9 and instrumentation. [10][11][12] Compared with conventional thermoelectric materials, many novel thermoelectric mechanisms and technologies such as superlattices and quantum dots have been investigated recently.13-15 For superlattices materials, every layer contains several or dozens of atoms. Such the ultra-short-period superlattices can offer tremendous quantumconfinements and interface scattering than bulk material. Using quantum-confinement effects, an enhanced density of states close to the Fermi energy can be obtained. With the same effect, a ZT of 0.9 at 300 K has been reported in PbSe 0.98 Te 0.02 /PbTe quantum-dot structure. 16 In addition, the higher area versus volume ratio, lower feature size of thin-film superlattices and the enhanced of phonon scattering reduce the phonon mean free path of carriers, which in turn reduces the thermal conductivity.17 Furthermore, ultra-short-period superlattices offer significantly higher in-plane carrier mobility, therefore, an enhanced carrier mobility in monolayer-range superlattices is effectively carried out in the cross-plane direction for certain superlattices. 1 Base on the above a...