The optimization of chemical mechanical planarization process-parameters of c-plane gallium-nitride using Taguchi method and grey relational analysis

Nelabhotla, D.M.; Jayaraman, Tanjore V.; Asghar, Khushnuma; Das, Dibakar

doi:10.1016/j.matdes.2016.05.031

Cited by 55 publications

(34 citation statements)

References 38 publications

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“…Apart from this, this FSW tool also leads to plastic deformation at the location of the joints, thereby enabling the joining of the parent metals, even when they are in the solid state. These reasons make this FSW technique a preferable one for many alloys in the recent years, when compared with that of the other conventional joining techniques [11,12].…”

Section: Introductionmentioning

confidence: 99%

Experimental investigation on the improvement of the properties of the AZ80A Mg alloy joints using friction stir welding process

Sevvel¹,

Mahadevan²,

Sateš³

et al. 2019

FME Transactions

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An experimental investigation was conducted with the basic objective of demonstrating the feasibility of joining the AZ80A Mg alloys using the technique of friction stir welding (FSW). Good quality joints free from defects were obtained for 5mm thickness AZ80A Mg alloy flat plates at a speed of rotation of 750 rpm with a traversing speed of 1.5 mm/min, by employing a FSW tool fabricated out of M35 grade High Speed Steel(HSS). It was experimetally observed that, the nugget zone (NZ) of the defect free weldments were found with fine sized, equally spaced & uniformly distributed grains when compared with that of the parent metal. Apart from this, the heat affected zone (HAZ) lying beside the NZ was found to possess larger sized near equaxied grains due to the effect of annealing. The weld zones were found to possess regions of slight softening nature when compared to that of the parent metal, arising from the dislocation of the lower densities. Moreover, the tensile strength of the defect free weldments was found to be around 78% of the parent metal, which seems to better than that of the strengths obtained using conventional joining techniques.

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Section: Introductionmentioning

confidence: 99%

Experimental investigation on the improvement of the properties of the AZ80A Mg alloy joints using friction stir welding process

Sevvel¹,

Mahadevan²,

Sateš³

et al. 2019

FME Transactions

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show abstract

“…Many factors in the fabrication process affect the quality of a TCO thin film. The Taguchi method increases experimental efficiency and is extensively used to improve the quality of low cost products . This study uses an orthogonal array (L 9 3 4 ) for the Taguchi design.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Al and Ga Co‐Doped ZnO Films on Flexible Substrates and Control Charts Monitor Deposition Process

Lin

2019

Physica Status Solidi (a)

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doped zinc oxide (AGZO) films are deposited onto flexible poly (ethylene terephthalate) (PET) substrates by radio frequency magnetron sputtering. Before the AGZO film coating, oxygen plasma etching is used to modify the surface of the PET substrate. The results show that the substrate is very hydrophilic. This study determines the effect of the deposition parameters on the structural, morphological, and optoelectronic performances of AGZO films. Based on the gray Taguchi analysis for the AGZO film coatings show that the electrical resistivity is decreased to 6.30 Â 10 À3 Ω cm and the optical transmittance is increased to 81.0%. The XRD diffraction and TEM images show that the AGZO films exhibit a hexagonal ZnO wurtzite structure. A comparison of the PET substrates that do or do not undergo plasma pretreatment, shows that the AGZO films coating there is a 4.7% improvement in elastic recovery, a 13.65% improvement in hardness H, a 1.69% improvement in the elastic modulus E, a 12.15% improvement in in H/E, and a 42.06% improvement in H 3 /E 2 . Shewhart control charts are used to monitor the deposition processes for the AGZO films. Finding shown that the deposition parameters for the films and process performance are in control and stable.

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“…Nelabhotla et al [31] applied Taguchi-based grey relational analysis (TGRA) for the optimization of chemical mechanical planarization (CMP) process-parameters of c-plane gallium-nitride (GaN), in potassium-permanganate/alumina (KMnO 4 /Al 2 O 3 ) slurry. Wang [32] applied Grey relational analysis to the optimization of mining costs.…”

Section: Introductionmentioning

confidence: 99%

A New Grey Relational Analysis Model Based on the Characteristic of Inscribed Core (IC-GRA) and Its Application on Seven-Pilot Carbon Trading Markets of China

Wang

Yin

Cao

et al. 2018

IJERPH

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In recent years, the study of the factors affecting the carbon trading price plays an important role in promoting the carbon trading markets and the sustainable development of green economy. However, due to the short establishment time of China’s carbon trading market, the carbon trading price data of the pilot markets were not complete and have the typical characteristics of poor information. The traditional grey correlation model cannot effectively identify the volatility and the grey correlation coefficient of trading data. In this paper, an inscribed cored grey relational analysis model (IC-GRA) is constructed by extracting the values of the triangle inscribed center of the time series sample. Through numerical examples and empirical analysis, it is verified that IC-GRA not only satisfies the four axioms of traditional grey correlation but also avoids the influence of outliers of time series fluctuation and improves the discriminability of the grey correlation coefficient. The empirical results of the IC-GRA model in China’s seven pilot carbon trading markets show that: 1. among international carbon trade factor, the biggest influence factor carbon trade price is different in pilot markets. The price of natural gas has a greater correlation with the carbon price of carbon trading markets in Shenzhen, Guangzhou, and Chongqing. The futures price of Certified Emission Reduction (CER) has a strong correlation with the carbon price of Shanghai and Beijing carbon trading markets; the price of Hubei carbon trading market is the largest related to crude oil future price in the New York Mercantile Exchange ( NYMEX). 2. Air Quality Index (AQI) is most relevant to the market carbon price of carbon trading, followed by the trading turnover and trading volume of the carbon trading market. Therefore, studying the carbon trading price of the carbon trading market plays a positive role in improving the sustainable development in those areas.

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The optimization of chemical mechanical planarization process-parameters of c-plane gallium-nitride using Taguchi method and grey relational analysis

Cited by 55 publications

References 38 publications

Experimental investigation on the improvement of the properties of the AZ80A Mg alloy joints using friction stir welding process

Experimental investigation on the improvement of the properties of the AZ80A Mg alloy joints using friction stir welding process

Fabrication of Al and Ga Co‐Doped ZnO Films on Flexible Substrates and Control Charts Monitor Deposition Process

A New Grey Relational Analysis Model Based on the Characteristic of Inscribed Core (IC-GRA) and Its Application on Seven-Pilot Carbon Trading Markets of China

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