A new type of hot embossing machine was developed, which comprised of frame structure and pressing head. To ensure fitting accuracy of the pressing heads, static simulation of columns as vertical moving guide was conducted, simulation results demonstrated that the column of the frame structure possessed enough stiffness via adopting the material of Q235 and the size of 30 mm, and the largest radial deformation of the column reached to 2.5nm. Thermoelectric refrigeration reactor (TRR) as the improved heating mode was utilized and the power was determined. Because the TRRs did not bear the whole pressing load, different types of pressing head are developed, which achieved the separation of pressing load and TRR’s preload. Distributions of deformation on the feed direction were analysed for different types of pressing head. And simulation results demonstrated that the pressing head of "王" exhibited the best homogeneous deformation through comparing with other types of pressing head, which the maximum variation of deformation distribution approximately reached to 30nm. Additionally, force-thermal coupling simulation of pressing head plate as a core component was conducted to reduce thermal stress, and effects of distributions of deformation and temperature were discussed. For the given time, the head plate with the thickness of 18mm exhibited good uniformity of temperature and moderate heating rate, which the mentioned parameters reached 0.03°C/um 2 and 0.35°C/s, respectively. Generally, the applied thermal load decreases the deformation uniformity to a certain extent.