2003
DOI: 10.1016/s0040-6090(03)00952-0
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The optimization of Ta buffer layer in magnetron sputtering IrMn top spinvalve

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Cited by 13 publications
(5 citation statements)
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“…The absence of the Co (111) peak along with any other Co peaks in the GI spectrum can be also due to the absence of prevailing texture in the film. With regard to the Ta buffer layer, the same diffraction peaks were also observed in [43] when Ta was sputtered onto an SiO 2 substrate and was attributed to a Ta (100) textured film. The different intensities of Ta diffraction peaks, as demonstrated in Figure 1c, at the same layer thicknesses, can be attributed to different textures of FeMn and IrMn underlying layers.…”
Section: Structure Propertiessupporting
confidence: 55%
“…The absence of the Co (111) peak along with any other Co peaks in the GI spectrum can be also due to the absence of prevailing texture in the film. With regard to the Ta buffer layer, the same diffraction peaks were also observed in [43] when Ta was sputtered onto an SiO 2 substrate and was attributed to a Ta (100) textured film. The different intensities of Ta diffraction peaks, as demonstrated in Figure 1c, at the same layer thicknesses, can be attributed to different textures of FeMn and IrMn underlying layers.…”
Section: Structure Propertiessupporting
confidence: 55%
“…This phase is formed in the buffer layer of sample S Ta , since its peak does not appear in the pattern of S Nb . The formation of β-Ta phase is also found when Ta is deposited on SiO 2 or naturally oxidized Si substrates [16]. The (111) and (200) reflections of fcc-IrMn are peaked at 2θ ¼ 42.95°and 49.85°, respectively, for S Nb ; and at 2θ ¼ 42.62°and 49.61°, respectively, for S Ta ; these peaks are shifted to higher angles when compared to the standard bulk IrMn: 2θ ¼ 41.40°and 48.17°, respectively.…”
Section: Resultsmentioning
confidence: 87%
“…The nominal stoichiometries of CoFeB and IrMn targets were Co0.4Fe0.4B0.2 and Ir0.22Mn0.78 (in the paper, for sake of simplicity we will call them CoFeB and IrMn, respectively, without specifying the elemental composition). The Ta(5)/Ru(18)/Ta(3) buffer layer was used to avoid CoFeB intermixing with the substrate, to improve its crystallization [36] and the [111] texture of IrMn, which determines the exchange bias with CoFeB [37]. The IrMn thickness (tIrMn) was varied between 3.5 and 8 nm to investigate its influence on the IrMn blocking temperature.…”
Section: Methodsmentioning
confidence: 99%