2006
DOI: 10.1557/proc-979-0979-hh11-50
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The Origin and Implications of (111)-Textured Grains Obtained via Nucleation and Growth of Solids in Pulsed-Laser-Quenched Al Films on SiO2

Abstract: We have investigated excimer laser irradiation of 2000-Å-thin as-deposited Al films on SiO 2 . Microstructural analysis of the irradiated films conducted with AFM and EBSD techniques reveals that there exists a wide energy density interval over which large equaxed grains with a strong (111) texture are obtained. Based on thermal, transformational, and microstructural considerations, we propose a heterogeneous nucleation model to account for the observed behaviors, and discuss the implication of the model on th… Show more

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Cited by 2 publications
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“…Thin film processing methods based on laser‐induced melting and solidification have been employed for tailoring the microstructure of Si12 and metallic films such as Al13 and NiTi 14. These methods, however, have not been applied before to ceramic films because of their brittleness and high melting temperatures.…”
mentioning
confidence: 99%
“…Thin film processing methods based on laser‐induced melting and solidification have been employed for tailoring the microstructure of Si12 and metallic films such as Al13 and NiTi 14. These methods, however, have not been applied before to ceramic films because of their brittleness and high melting temperatures.…”
mentioning
confidence: 99%