The passivating effect of Si(100)–As surface and the adsorption of oxygen

Abstract

The interaction of oxygen with a Si(100)–As surface has been studied by a homemade combined surface analysis spectrometry with a molecular beam epitaxy system. This paper confirms that an As layer is a good passivation film for the Si surface and describes a study concerning all processes of oxygen adsorption on a Si(100)–As surface for the first time. It is shown that the oxygen coverage at saturation is 0.5 monolayer, i.e., adsorption sites are reduced by one-half with the existence of an As layer and the initial sticking coefficient SSi–Aso on the Si(100)–As surface was found to be 5.6×10−3, which is ten times less than that for a clean Si(100) surface. The passivating effect of the As on the Si surface is interpreted with the existence of lone-pair states instead of dangling-bond states.

An RDS, LEED, and STM Study of MOCVD-Prepared Si(100) surfaces

“…There have been a number of studies of the adsorption of AsH 3 , PH 3 , arsenic and phosphorus on silicon surfaces in ultrahigh-vacuum (UHV). Whereas dangling bonds on the Si(1 0 0) surface make it very reactive, As-terminated Si contains no dangling bonds and is very passive [3]. For both ARTICLE IN PRESS www.elsevier.com/locate/jcrysgro 0022-0248/$ -see front matter r 2004 Elsevier B.V. All rights reserved.…”

5-7-5 line defects onAs∕Si(100): A general stress-relief mechanism for V/IV surfaces

“…[2][3][4][5] Group-V terminated Si and Ge surfaces are nearly ideal for studies of surface stress. 3,4,6 Group-V atoms chemically passivate Si and Ge surfaces, 7,8 so any reorganization of the surface is primarily a response to surface stress.…”

The Effect of Inlet Velocity on CH4 Catalytic Combustion Behavior with H2 Addition in a Microchannel Combustor

“…To understandt he influence of the inlet velocity on the reaction speed of methaneinthe axial direction of the combustor, the variation in the methane mass fraction in the unit length along the axis direction was defined as the methane reaction rate. [30] As shown in Figure 10, the methane reaction rate increased sharply at first then decreased slowly along the axial direction. There was no significantc hange in the methaner eaction rate as the added hydrogen fraction was varied.…”