The photonic integration of non-solid media using optofluidics

Schmidt, Holger; Hawkins, Aaron R.

doi:10.1038/nphoton.2011.163

Cited by 288 publications

(189 citation statements)

References 97 publications

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“…Already, they have sparked great interest for communications and computing technology 3,4 . Other rapidly emerging applications meanwhile include light detection and ranging 5 , optofluidics 6 and more.…”

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confidence: 99%

Nanophotonic integrated circuits from nanoresonators grown on silicon

Chen

et al. 2014

Nat Commun

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Harnessing light with photonic circuits promises to catalyse powerful new technologies much like electronic circuits have in the past. Analogous to Moore's law, complexity and functionality of photonic integrated circuits depend on device size and performance scale. Semiconductor nanostructures offer an attractive approach to miniaturize photonics. However, shrinking photonics has come at great cost to performance, and assembling such devices into functional photonic circuits has remained an unfulfilled feat. Here we demonstrate an on-chip optical link constructed from InGaAs nanoresonators grown directly on a silicon substrate. Using nanoresonators, we show a complete toolkit of circuit elements including light emitters, photodetectors and a photovoltaic power supply. Devices operate with gigahertz bandwidths while consuming subpicojoule energy per bit, vastly eclipsing performance of prior nanostructure-based optoelectronics. Additionally, electrically driven stimulated emission from an as-grown nanostructure is presented for the first time. These results reveal a roadmap towards future ultradense nanophotonic integrated circuits.

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confidence: 99%

Nanophotonic integrated circuits from nanoresonators grown on silicon

Chen

et al. 2014

Nat Commun

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“…Certain conventional microfabrication technologies, such as soft [4][5][6] or UV lithography, 7 have been used to integrate two-dimensional (2D) microoptical devices, including optical waveguides, microring resonators, and distributed feedback dye lasers, with microfluidics. [2][3][4][5][6][7][8] These optofluidic chips afford a wide range of applications in light propagation, wavelength tuning and microfluidic lasing. The integration of three-dimensional (3D) optical micro/ nanostructures has further advanced the functionalization of optofluidic devices.…”

Section: Introductionmentioning

confidence: 99%

In-channel integration of designable microoptical devices using flat scaffold-supported femtosecond-laser microfabrication for coupling-free optofluidic cell counting

Niu

et al. 2015

Light Sci Appl

123

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The high-precision integration of three-dimensional (3D) microoptical components into microfluidics in a customizable manner is crucial for optical sensing, fluorescence analysis, and cell detection in optofluidic applications; however, it remains challenging for current microfabrication technologies. This paper reports the in-channel integration of flexible two-dimensional (2D) and 3D polymer microoptical devices into glass microfluidics by developing a novel technique: flat scaffold-supported hybrid femtosecond laser microfabrication (FSS-HFLM). The scaffold with an optimal thickness of 1-5 mm is fabricated on the lower internal surface of a microfluidic channel to improve the integration of high-precision microoptical devices on the scaffold by eliminating any undulated internal channel surface caused by wet etching. As a proof of demonstration, two types of typical microoptical devices, namely, 2D Fresnel zone plates (FZPs) and 3D refractive microlens arrays (MLAs), are integrated. These devices exhibit multicolor focal spots, elongated (.three times) focal length and imaging of the characters 'RIKEN' in a liquid channel. The resulting optofluidic chips are further used for coupling-free white-light cell counting with a success rate as high as 93%. An optofluidic system with two MLAs and a W-filter is also designed and fabricated for more advanced cell filtering/counting applications.

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“…Optofluidic platforms, which combine optics and microfluidics in a single system, have recently become popular for use as biosensors [1]. There exists a wide variety of techniques and methods that can be employed in order to create an optical biosensor.…”

Section: Introductionmentioning

confidence: 99%

“…Some of these methods include interferometry, evanescent fields, fluorescence, and spectral absorption [1,2]. We present an optofluidic waveguiding labon-a-chip that uses a hollow-core anti-resonant reflecting optical waveguide (ARROW) in order to detect individual biological particles [3].…”

Section: Introductionmentioning

confidence: 99%

Materials and microfabrication processes for ARROW-based optofluidic biosensors

Wall

Parks

Schmidt

et al. 2015

2015 IEEE 58th International Midwest Symposium on Circuits and Systems (MWSCAS)

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Abstract-This paper outlines the microfabrication processes and materials used to make an optofluidic lab-on-a-chip biosensor that detects individual biological particles. The biosensor uses a hollow-core ARROW waveguide with a low refractive index liquid core and is fabricated on a silicon wafer using a combination of PECVD deposition, RIE etching, and standard photolithographic processes. As a sensing example, detection of fluorescence signals emitted by labeled oligonucleotides inside the liquid core was used to illustrate the chip's potential to identify protein-coding regions of the Zaire Ebola virus genome.

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The photonic integration of non-solid media using optofluidics

Cited by 288 publications

References 97 publications

Nanophotonic integrated circuits from nanoresonators grown on silicon

Nanophotonic integrated circuits from nanoresonators grown on silicon

In-channel integration of designable microoptical devices using flat scaffold-supported femtosecond-laser microfabrication for coupling-free optofluidic cell counting

Materials and microfabrication processes for ARROW-based optofluidic biosensors

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