The Physical Essence of the Method of Physical Vapor Deposition and the Equipment for Its Application

Gavariev, R. V.; Gavarieva, K. N.

doi:10.1007/978-3-031-65870-9_83

Lecture Notes in Mechanical Engineering

2024

DOI: 10.1007/978-3-031-65870-9_83

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The Physical Essence of the Method of Physical Vapor Deposition and the Equipment for Its Application

R. V. Gavariev,

K. N. Gavarieva

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The Physical Essence of the Method of Physical Vapor Deposition and the Equipment for Its Application

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References 16 publications

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