2022
DOI: 10.1002/app.52407
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The potentialities of ultrasound as an alternative to chemical etching for proton beam writing micropatterning

Abstract: In this paper, we explore the potentialities of using ultrasound waves as a postirradiation treatment after proton beam writing (PBW) patterning of PTFE. To that end, 2-mm-thick foils of PTFE were irradiated with 2.2 MeV protons with an average current of 50 pA. Straight line structures were patterned on the polymer with a 3.5 Â 3.5 μm 2 focused proton beam. Post-irradiation polymers were placed in a heat bath at 60 C and immersed either in distilled water or in a 6 M solution of NaOH under the action of 40 kH… Show more

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