The properties of N-doped diamond-like carbon films prepared by helicon wave plasma chemical vapor deposition

Chen, Jiali; Ji, Peiyu; Chen, Jin; Zhuge, Lanjian; Wu, Xuemei

doi:10.1088/2058-6272/aaee90

Cited by 9 publications

(5 citation statements)

References 31 publications

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“…Again, from Guo et al, , the pulse-modulated DLC deposition from various organic solvents showed the broadened D and G band under low dc bias conditions of DLC patterns, which may attribute to the small granular carbon deposits as well as the high amount of hydrogen content. The decreasing trends in the intensity ratio of the D band to the G band, i.e., I D / I G were found to be 1.14, 1.10, and 0.66 in DLC 0.5 , DLC 1.0 , and DLC 1.5 , respectively, were attributed to the increasing order in the sp 3 content in the DLC patterns. ,,, The lowest I D / I G in the DLC 1.5 patterned film indicates a high sp 3 –sp 2 ratio in the DLC film as compared to DLC 0.5 and DLC 1.0 .…”

Section: Resultsmentioning

confidence: 92%

“…The decreasing trends in the intensity ratio of the D band to the G band, i.e., I D / I G were found to be 1.14, 1.10, and 0.66 in DLC 0.5 , DLC 1.0 , and DLC 1.5 , respectively, were attributed to the increasing order in the sp 3 content in the DLC patterns. 3 , 5 , 6 , 41 The lowest I D / I G in the DLC 1.5 patterned film indicates a high sp 3 –sp 2 ratio in the DLC film as compared to DLC 0.5 and DLC 1.0 .…”

Section: Resultsmentioning

confidence: 96%

“…The decreasing trends in the intensity ratio of the D band to the G band, i.e., I D /I G were found to be 1.14, 1.10, and 0.66 in DLC 0.5 , DLC 1.0 , and DLC 1.5 , respectively, were attributed to the increasing order in the sp 3 content in the DLC patterns. 3,5,6,41 The lowest 42,43 The evolution of oxidation reaction at the anodic silicon substrate occurs while depositing carbon radicals. The chemical bonding between carbon atoms and their native functionalization on the surface of the DLC films was quantified (as shown in Table 2) from the high-resolution C 1s spectra.…”

Section: Physicochemical Studies Of Patterned Dlcmentioning

confidence: 99%

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Diamond-like Carbon Patterning by the Submerged Discharge Plasma Technique via Soft Solution Processing

et al. 2023

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Submerged plasma-assisted discharge direct patterning of diamond-like carbon (DLC) onto the silicon substrate in ambient conditions has succeeded as a new and novel soft solution process. In this environmentally benign technique, a copious amount of pure ethanol (ca. 4 mL) was locally activated with a maximum of ca. 0.23 mkWh by an aselectrochemically synthesized ultrasharp tungsten tip. With the assisted submerged plasma, the decomposed ethanol molecules are anodically patterned directly onto the silicon substrate in ambient conditions. The physical nature of DLC patterns was accessed by profilometry, atomic force microscopy, scanning electron microscopy, and transmission electron microscopy analysis. Furthermore, Fourier-transform infrared, Raman, and X-ray photoelectron spectra were analyzed for chemical compositions and structures, such as surface functionalization, carbon−carbon bonding, and sp 2 −sp 3 ratio, respectively. From a Berkovich-configured nanoindentation analysis, Young's modulus and hardness have shown increasing trend with increasing sp 3 −sp 2 ratio in DLC patterns of 68.5 and 2.8 GPa, respectively. From the electrochemical cyclovoltammetry analysis, a maximum areal specific capacitance of 205.5 μF/cm 2 has been achieved at a scan rate of 5 mV/s. The one-step, green, and environmentally sustainable approach of rapid formation of DLC patterns is thus a promising technique for various carbon-based electrode fabrication processes.

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Section: Resultsmentioning

confidence: 92%

Section: Resultsmentioning

confidence: 96%

“…The decreasing trends in the intensity ratio of the D band to the G band, i.e., I D /I G were found to be 1.14, 1.10, and 0.66 in DLC 0.5 , DLC 1.0 , and DLC 1.5 , respectively, were attributed to the increasing order in the sp 3 content in the DLC patterns. 3,5,6,41 The lowest 42,43 The evolution of oxidation reaction at the anodic silicon substrate occurs while depositing carbon radicals. The chemical bonding between carbon atoms and their native functionalization on the surface of the DLC films was quantified (as shown in Table 2) from the high-resolution C 1s spectra.…”

Section: Physicochemical Studies Of Patterned Dlcmentioning

confidence: 99%

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Diamond-like Carbon Patterning by the Submerged Discharge Plasma Technique via Soft Solution Processing

et al. 2023

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“…The mechanical properties of N-doped DLC were studied by Chen and the co-authors. They found that the friction coe cient of N-doped DLC varied from 0.04 to 0.01 by increasing N 2 ow rate from 5 sccm to 50 sccm (Chen et al 2018). The in uence of transition metal doping on the tribological properties of DLC lms has been studied by Gayathri et al in 2015.…”

Section: Introductionmentioning

confidence: 99%

Optical and structural properties of nitrogen incorporated Ni doped diamond-like carbon thin films

Zarei

Momeni

2023

Opt Quant Electron

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Co-depositing of nickel (Ni) and nitrogen (N2) in the diamond-like carbon (DLC) matrix was synthesized by pulsed laser deposition (PLD) technique. In the work presented here, N2 was injected as a reactive gas to optimize the optical, and structural properties of Ni:N-DLC thin lms, although N2 to argon (Ar) gas ratio was kept constant. Statistical properties of thin lms were calculated from the surface topographic images of 2Ni:N-DLC, 3Ni:N-DLC, and 4Ni-N-DLC samples. The characterization of samples have been carried out by by atomic force microscopy (AFM), Raman spectroscopy, X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and ultraviolet-visible spectroscopy. Band gap energies of 2Ni:N-DLC, 3Ni:N-DLC and 4Ni:N-DLC have been illustrated that the background N2 gas can be used for optimization of the electrical properties of Ni-DLC thin lms.

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“…In this work, HWP-CVD technology was used to study the preparation of N-DLC thin films [13][14][15]. The effect of fixed precursor methane changing nitrogen flow was investigated in a previous work [16]. The mechanical properties affected by the structure of the thin film were analyzed.…”

Section: Introductionmentioning

confidence: 99%

The effect of nitrogen concentration on the properties of N-DLC prepared by helicon wave plasma chemical vapor deposition

Yang¹,

Huang²,

Li³

et al. 2022

Plasma Sci. Technol.

Self Cite

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Nitrogen-doped diamond-like carbon (N-DLC) films were synthesized by helicon wave plasma chemical vapor deposition (HWP-CVD). The mechanism of the plasma influence on the N-DLC structure and properties was revealed by the diagnosis of plasma. The effects of nitrogen doping on the mechanical and hydrophobicity properties of DLC films were studied. The change of the ratio of precursor gas flow reduces the concentration of film-forming groups, resulting in the decrease of growth rate with the increase of nitrogen flow rate. The morphology and structure of N-DLC films were characterized by scanning probe microscopy (SEM), Raman spectroscopy (Raman), X-ray photoemission spectroscopy (XPS). The mechanical properties and wettability of N-DLC were analyzed by ultra-microhardness tester and JC2000DM system. The results show that the content ratio of N+ and N2+ is positively correlated with the mechanical properties and wettability of N-DLC films. The enhancement hardness and elastic modulus of N-DLC are attributed to the increase of sp3 C-N bond content in the film, reaching 26.5 GPa and 160 GPa respectively. Water contact measurement shows that the increase of the N-bond structure in N-DLC makes the film have excellent hydrophobic properties, and the optimal water contact angle has reached 111.2 degree. It is shown that the HWP technology has unique advantages in the modulation of functional nanomaterials.

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The properties of N-doped diamond-like carbon films prepared by helicon wave plasma chemical vapor deposition

Cited by 9 publications

References 31 publications

Diamond-like Carbon Patterning by the Submerged Discharge Plasma Technique via Soft Solution Processing

Diamond-like Carbon Patterning by the Submerged Discharge Plasma Technique via Soft Solution Processing

Optical and structural properties of nitrogen incorporated Ni doped diamond-like carbon thin films

The effect of nitrogen concentration on the properties of N-DLC prepared by helicon wave plasma chemical vapor deposition

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