The Properties of RF Sputtered Zirconium Oxide Thin Films at Different Plasma Gas Ratio

Abstract

Zirconium oxide thin films deposited on the p-type Si(100) substrates by radio-frequency (RF) reactive magnetron sputtering with different plasma gas ratios have been studied by using spectroscopic ellipsometry (SE), atomic force microscopy (AFM), X-ray diffraction (XRD), and X-ray photoelectron spectroscopy (XPS). The deposition of the films was monitored by the oxygen gas ratio which has been increased from 0 to 80%. We found that the thickness and roughness of the zirconium oxide thin films are relatively constant. The XRD revealed that the deposited thin films have polycrystalline phases, Zr(101) and monoclinic ZrO2 (131). The XPS result showed that the oxidation states of zirconium suboxides were changed to zirconia form with increasing O2 gas ratio.

Electrochemical assessment of characteristics and corrosion behavior of Zr-containing coatings formed on titanium by plasma electrolytic oxidation

“…The peak C with the binding energy of 186.3 eV could be attributed to zirconium in ZrTiO 4 compound. The described above peaks are in good agreement with those reported by other researchers [24][25][26][27]. Furthermore the presence of Si and P was confirmed.…”

An innovative technique to simply fabricate ZrO2–HA–TiO2 nanostructured layers

“…Formation of ZrO 2 compound is confirmed by the peaks C and D located at the binding energies of 182.4 and 183.8 eV. These achievements are in good agreement with those reported by other researchers [61,62]. The P(2p) core level binding energy is exhibited in Fig.…”

“…The peak A, located at the binding energy of 529.7 eV, is assigned to the oxygen in the oxides lattice namely ZrO 2 and TiO 2 . The peak B, at the binding energy of 531.0 eV, corresponds to the oxygen in nonstoichiometric zirconium oxides [61]. The peak C at the binding energy of 532.2 eV represents the -OH groups in the HAp molecules.…”

Electrophoretic enhanced micro arc oxidation of ZrO2–HAp–TiO2 nanostructured porous layers

“…Finally, formation of ZrO 2 compound is confirmed by the peaks E and F located at the binding energies of 182.4 and 183.5 eV. These achievements are in good agreement with those reported by other researchers [68,69]. The P(2p) core level binding energy is exhibited in Fig.…”