The relationship between structure and mechanical properties of hydrogenated amorphous carbon films

Kahn, Markus; Paskvale, S.; Čekada, Miha; Schöberl, Thomas; Waldhauser, W.; Mitterer, Christian; Pelicon, Primož; Brandstätter, Elmar

doi:10.1016/j.diamond.2010.06.009

Cited by 18 publications

(8 citation statements)

References 12 publications

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“…This decrease in FWHM is an evidence that the structural disorder of the active screen system prepared films is lower. Similar relationship between the values of FWHM (G) and disorder was found by Kahn 18 . When the G band position and the hydrogen content of DLC films are analyzed, it can be seen that the G band position increases with hydrogen content decrease for DLC films by using active screen system.…”

Section: Resultssupporting

confidence: 85%

DLC Films Grown On Steel Using An Innovator Active Screen System For PECVD Technique

et al. 2016

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In this work, an active screen plasma discharge system based technology was incorporated in a PECVD reactor for DLC films growth, making it a new development in DLC films deposition. In this case, the active screen system is used to seek better electrons confinement, which might result in high ions density due to the collisions number increase, leading to a possible increase in ionization. DLC films were grown on steel substrates, using two variations of this system. In order to enhance adhesion between coating and substrate, a silicon interlayer was deposited, using different bias voltages. Morphological and structural characterization was performed by scanning electron microscopy, optical profilometry and Raman scattering spectroscopy. Tribological tests were performed by nanohardness, scratch and wear tests. Results showed that the plasma confinement promoted good films adhesion, which may be related to a high sub-implantation. This might be a consequence of the pressure decrease, as well as, to the ions energy distribution narrowing.

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Section: Resultssupporting

confidence: 85%

DLC Films Grown On Steel Using An Innovator Active Screen System For PECVD Technique

et al. 2016

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“…The nanohardness could be tuned up to 3600 Vickers hardness (HV) for single layers deposited on silicon wafers. The overall sp 3 content is highest in the films deposited with the lowest discharge voltage of 1 kV and decreases almost linearly the discharge voltage (8). The nanohardness was found to be strongly dependent on the Csp 3 Csp 3 bonding content of the films (8).…”

Section: Resultsmentioning

confidence: 90%

“…The overall sp 3 content is highest in the films deposited with the lowest discharge voltage of 1 kV and decreases almost linearly the discharge voltage (8). The nanohardness was found to be strongly dependent on the Csp 3 Csp 3 bonding content of the films (8). In particular, increasing hardness and elastic modulus are connected with increasing structural disorder; i.e., the Csp 3 Csp 3 content, and topological disorder, i.e.…”

Section: Resultsmentioning

confidence: 92%

Corrosion Properties of DLC-Coated Stainless Steel in Hanks Solution for Biomedical Applications

et al. 2011

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Three-types of diamond-like carbon (DLC) coatings were prepared by employment of an anode layer source on stainless steel substrates (316L). The DLC films show an amorphous structure and their thickness ranges between 1.1 to 1.5 μm. An interlayer of sputtered Cr was used as buffer between the DLC and stainless steel substrate in order to enhance adhesion. The corrosion properties of DLC-coated stainless steel in Hank's solution (pH=7.2) were studied using electrochemical methods. Results show that all DLC-coated substrates have up to one order of magnitude better corrosion resistance than a bare substrate.

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“…Therefore, a comprehensive study, employing ERDA/RBS, dual wavelength Raman spectroscopy and nanoindentation was carried out. The results of this investigation can be found in 19 . Here, only the landmarks of this publication are presented in brief.…”

Section: Case Study: Ta-c:hmentioning

confidence: 99%

“…(G) and intensity ratio I D /I G (532 nm excitation wavelength) as a function of the discharge voltage (from19 ) …”

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confidence: 99%

Raman Spectroscopy of Carbon Based Films – Spectra Interpretation and Selected Applications

Kahn

Waldhauser

2010

Berg Huettenmaenn Monatsh

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The relationship between structure and mechanical properties of hydrogenated amorphous carbon films

Cited by 18 publications

References 12 publications

DLC Films Grown On Steel Using An Innovator Active Screen System For PECVD Technique

DLC Films Grown On Steel Using An Innovator Active Screen System For PECVD Technique

Corrosion Properties of DLC-Coated Stainless Steel in Hanks Solution for Biomedical Applications

Raman Spectroscopy of Carbon Based Films – Spectra Interpretation and Selected Applications

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