The Removal of In₂O₃SnO₄Using a Round Bar-Shaped Micro Machining Tool for the Economic Recycling of Defective Displays

Abstract

A newly devised process using round bar-shaped electrodes and ultrasonic enhancement in a micro-electrochemical machining (UMECM) process is described. The purpose is the precise removal of In2O3SnO2thin-film nanostructures from optoelectronic flat panel display color filter surfaces. In the current experiment it was found that a large surface area cathode and a small gap-size between the cathode and workpiece was found to remove the In2O3SnO2rapidly. A high feed rate of the workpiece (the display with color filter) and adequate electrical power results in fast machining. Pulsed direct current improves dregs discharge and this is an advantage with a fast feed. A high electrode rotational speed also corresponds to faster removal of the In2O3SnO2nanostructures. The development of the proposed precision production design is based on both technical and economic considerations.