The research of the properties of thin films of molybdenum to form the contact masks for diffractive optics elements

Abstract

Abstract.Researched the parameters of the microstructures, obtained by laser termochemical space recording in films of molybdenum with a thickness of 17, 35 and 70 nm, deposited on a glass and quartz substrates. Graphs of the spatial resolution of the microstructures as a function of the laser power are plotted for different substrate materials. It is shown that a higher spatial resolution of the microstructures can be achieved in the molybdenum films with a 17 nm thickness.Keywords: microstructure, laser ablation, thermal recording of a molybdenum film, glass and quartz substrates Citation: Poletaev S.D. The research of the properties of thin films of molybdenum to form the contact masks for diffractive optics elements.