“…As substrate, silicon dioxide/silicon, aluminium oxide, glass, aluminium, and quartz and for electrodes platinum, gold, titanium, and copper are commonly employed. The electrode thickness ranges between 100 [26,43,45,46,51,66,67] and 300 nm [61], while the distance between two opposing electrodes varies between 5 µm [64] and 50 mm [43,51,60]. The measurement temperature is between 0 and 350 • C. Some of the sensors utilise a light activation of the sensor surface that allows significant reduction of the response time at low measurement temperatures, which can be derived from Table 3.…”