The role of atomic collisions in kinetic electron emission from Al surfaces by slow ions

Commisso, M.; Minniti, M.; Sindona, A.; Bonanno, A.; Oliva, A.; Baragiola, R. A.; Riccardi, P.

doi:10.1016/j.nimb.2006.12.045

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Cited by 10 publications

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“…One of them is the emission of secondary electrons. In some cases, Auger electron emission is observed [1][2][3]; it is necessary to produce an inner shell vacancy in the target atom. The vacancy production is a very selective process which depends on projectile-target atom combination and projectile energy.…”

Section: Introductionmentioning

confidence: 99%

Ion-induced Auger electrons contrast on cross-beam systems

Pereyaslavtsev

Naumkin

2019

Semicond. Sci. Technol.

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The article deals with the basic aspects of ion-stimulated Auger process. The authors suggested using the standard Everhart-Thornley detector to obtain a contrast of ion-induced Auger electrons on cross-beam systems using mathematical processing of the image which is based on spectroscopic information. As a result, this work consisted of obtaining images that showed the contrast distribution of Auger electrons and the sputtering yield on aluminum thin films samples.

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Section: Introductionmentioning

confidence: 99%