1997
DOI: 10.1063/1.365407
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The role of hydrogen and iron in silicon nitridation by ball milling

Abstract: Articles you may be interested inIdentification of the atomic-scale defects involved in the negative bias temperature instability in plasma-nitrided p -channel metal-oxide-silicon field-effect transistors

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Cited by 11 publications
(7 citation statements)
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“…Chen and Williams reported the competitive gas solid reactions during BM by monitoring pressure change [7]. Si 3 N 4 was synthesized by milling Si powder in NH 3 [8]. Solid-gas reactions of Nb and Ta with nitrogen driven by BM were also investigated [9].…”
Section: Introductionmentioning
confidence: 99%
“…Chen and Williams reported the competitive gas solid reactions during BM by monitoring pressure change [7]. Si 3 N 4 was synthesized by milling Si powder in NH 3 [8]. Solid-gas reactions of Nb and Ta with nitrogen driven by BM were also investigated [9].…”
Section: Introductionmentioning
confidence: 99%
“…8 We found that high N content in the as-milled powder is always accompanied by significant Fe contamination in the powder. When steps were taken to select milling conditions which substantially reduced Fe, the adsorbed N content was low.…”
mentioning
confidence: 96%
“…We have previously shown that H is lost during early stages of annealing at Ͻ300°C. 8 Note that differences in Fe content between as-milled and annealed samples are a result of changes in the content of other constituents: the apparent lack of change in the small Cr content is simply a result of round-off errors. Figure 1 shows x-ray diffraction ͑XRD͒ spectra of the above samples.…”
mentioning
confidence: 97%
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